发明授权
- 专利标题: Laser direct imaging apparatus
- 专利标题(中): 激光直接成像设备
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申请号: US12191684申请日: 2008-08-14
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公开(公告)号: US07969636B2公开(公告)日: 2011-06-28
- 发明人: Yoshitatsu Naito , Yoshitada Oshida , Mitsuhiro Suzuki
- 申请人: Yoshitatsu Naito , Yoshitada Oshida , Mitsuhiro Suzuki
- 申请人地址: JP Ebina-shi
- 专利权人: Hitachi Via Mechanics, Ltd.
- 当前专利权人: Hitachi Via Mechanics, Ltd.
- 当前专利权人地址: JP Ebina-shi
- 代理机构: Crowell & Moring LLP
- 优先权: JP2007-244142 20070920
- 主分类号: G02B26/08
- IPC分类号: G02B26/08
摘要:
A laser direct imaging apparatus which can expose photosensitive materials having various sensitivities and which can correct an imaging position in accordance with deformation of a workpiece. In the laser direct imaging apparatus, the workpiece is moved in a sub-scanning direction while a cylindrical lens is used to converge a laser beam, which has been modulated based on raster data, in the sub-scanning direction and deflect the laser beam toward a main scanning direction so as to image a desired pattern on the workpiece. The cylindrical axis of the cylindrical lens is designed to be able to rotate horizontally and to be able to change an angle with respect to the main scanning direction.
公开/授权文献
- US20090080047A1 Laser Direct Imaging Apparatus 公开/授权日:2009-03-26
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