Invention Grant
US07970037B2 Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections
失效
用于RF功率输送到具有级联传输线路部分的气体放电激光器的布置
- Patent Title: Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections
- Patent Title (中): 用于RF功率输送到具有级联传输线路部分的气体放电激光器的布置
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Application No.: US12482341Application Date: 2009-06-10
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Publication No.: US07970037B2Publication Date: 2011-06-28
- Inventor: Frederick W. Hauer , Patrick T. Tracy , R. Russel Austin
- Applicant: Frederick W. Hauer , Patrick T. Tracy , R. Russel Austin
- Applicant Address: US CA Santa Clara
- Assignee: Coherent, Inc.
- Current Assignee: Coherent, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Morrison & Foerster LLP
- Main IPC: H01S3/22
- IPC: H01S3/22
Abstract:
RF power is transmitted to a CO2 gas discharge laser form a source of RF power via a series combination of transmission line sections. The lengths and characteristic impedances of the transmission line sections are selected to transform the impedance of the RF power source to the operating impedance of the laser.
Public/Granted literature
- US20100316084A1 ARRANGEMENT FOR RF POWER DELIVERY TO A GAS DISCHARGE LASER WITH CASCADED TRANSMISSION LINE SECTIONS Public/Granted day:2010-12-16
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