发明授权
US07972931B2 Top-gate thin-film transistors using nanoparticles and method of manufacturing the same 有权
使用纳米颗粒的顶栅薄膜晶体管及其制造方法

Top-gate thin-film transistors using nanoparticles and method of manufacturing the same
摘要:
The present invention relates to a method of manufacturing thin-film transistors using nanoparticles and thin film transistors manufactured by the method. A hydrophilic buffer layers are deposited on the substrates to facilitate formation of nanoparticle films. Sintered nanoparticles are used as an active layer and dielectric materials of high dielectric coefficient are also used as a gate dielectric layer to form a top gate electrode on the gate dielectric layer, thereby enabling low-voltage operation and low-temperature fabrication.
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