发明授权
- 专利标题: Top-gate thin-film transistors using nanoparticles and method of manufacturing the same
- 专利标题(中): 使用纳米颗粒的顶栅薄膜晶体管及其制造方法
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申请号: US11623775申请日: 2007-01-17
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公开(公告)号: US07972931B2公开(公告)日: 2011-07-05
- 发明人: Sangsig Kim , Kyoung-Ah Cho , Dong-Won Kim , Jae-Won Jang
- 申请人: Sangsig Kim , Kyoung-Ah Cho , Dong-Won Kim , Jae-Won Jang
- 申请人地址: KR Seoul
- 专利权人: Korea University Industrial & Academic Collaboration Foundation
- 当前专利权人: Korea University Industrial & Academic Collaboration Foundation
- 当前专利权人地址: KR Seoul
- 代理机构: Locke Lord Bissell & Liddell LLP
- 优先权: KR10-2006-0029098 20060330; KR10-2006-0098467 20061010
- 主分类号: H01L21/477
- IPC分类号: H01L21/477
摘要:
The present invention relates to a method of manufacturing thin-film transistors using nanoparticles and thin film transistors manufactured by the method. A hydrophilic buffer layers are deposited on the substrates to facilitate formation of nanoparticle films. Sintered nanoparticles are used as an active layer and dielectric materials of high dielectric coefficient are also used as a gate dielectric layer to form a top gate electrode on the gate dielectric layer, thereby enabling low-voltage operation and low-temperature fabrication.
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