Invention Grant
- Patent Title: Methods for producing solid-state imaging device and electronic device
- Patent Title (中): 固态成像装置和电子装置的制造方法
-
Application No.: US12382713Application Date: 2009-03-23
-
Publication No.: US07977140B2Publication Date: 2011-07-12
- Inventor: Takeshi Takeda , Yukihiro Ando , Masaki Okamoto , Masayuki Okada , Kaori Takimoto , Katsuhisa Kugimiya , Tadayuki Kimura
- Applicant: Takeshi Takeda , Yukihiro Ando , Masaki Okamoto , Masayuki Okada , Kaori Takimoto , Katsuhisa Kugimiya , Tadayuki Kimura
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Rader, Fishman & Grauer PLLC
- Priority: JPP2008-110670 20080421
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for producing a solid-state imaging device includes steps of: forming transfer electrodes on a substrate having a plurality of light-sensing portions through a gate insulating layer so that the light-sensing portions are exposed; forming a planarized insulating layer on the substrate to cover the transfer electrodes formed on the substrate; forming openings in the planarized insulating layer so that each of the transfer electrodes is partly exposed out of the planarized insulating layer at a predetermined position; forming a wiring material layer so that the openings are filled with the wiring material layer; forming a resist layer on the wiring material layer; exposing and developing the resist layer so that only the resist layer in a predetermined area covering the openings is left; and patterning the wiring material layer using the exposed and developed resist layer to form connection wirings connected to the transfer electrodes by the openings.
Public/Granted literature
- US20090263929A1 Methods for producing solid-state imaging device and electronic device Public/Granted day:2009-10-22
Information query
IPC分类: