发明授权
US07977598B2 Apparatus and method for removal of surface oxides via fluxless technique involving electron attachment and remote ion generation 有权
通过涉及电子附着和远程离子生成的无通量技术去除表面氧化物的装置和方法

Apparatus and method for removal of surface oxides via fluxless technique involving electron attachment and remote ion generation
摘要:
The present invention provides a method and apparatus for the dry fluxing of at least one component and/or solder surface via electron attachment. In one embodiment, there is provided a method for removing oxides from the surface of a component comprising: providing a component on a substrate wherein the substrate is grounded or has a positive electrical potential to form a target assembly; passing a gas mixture comprising a reducing gas through an ion generator comprising a first and a second electrode; supplying an amount of voltage to at least one of the first and second electrodes sufficient to generate electrons wherein the electrons attach to at least a portion of the reducing gas and form a negatively charged reducing gas; and contacting the target assembly with the negatively charged reducing gas to reduce the oxides on the component.
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