Invention Grant
- Patent Title: Interferometer utilizing polarization scanning
- Patent Title (中): 干涉仪利用偏振扫描
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Application No.: US12267077Application Date: 2008-11-07
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Publication No.: US07978337B2Publication Date: 2011-07-12
- Inventor: Peter De Groot , Xavier Colonna De Lega
- Applicant: Peter De Groot , Xavier Colonna De Lega
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G02B21/00

Abstract:
In one aspect, the disclosure features methods that include using a microscope to direct light to a test object and to direct the light reflected from the test object to a detector, where the light includes components having orthogonal polarization states, varying an optical path length difference (OPD) between the components of the light, acquiring an interference signal from the detector while varying the OPD between the components, and determining information about the test object based on the acquired interference signal.
Public/Granted literature
- US20090128827A1 INTERFEROMETER UTILIZING POLARIZATION SCANNING Public/Granted day:2009-05-21
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