Invention Grant
US07982161B2 Method and apparatus for laser drilling holes with tailored laser pulses
有权
激光钻孔的方法和设备,具有定制的激光脉冲
- Patent Title: Method and apparatus for laser drilling holes with tailored laser pulses
- Patent Title (中): 激光钻孔的方法和设备,具有定制的激光脉冲
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Application No.: US12054115Application Date: 2008-03-24
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Publication No.: US07982161B2Publication Date: 2011-07-19
- Inventor: Yunlong Sun , Weisheng Lei , Hisashi Matsumoto , Brian Johansen , Gregg Hardy , Brian Baird
- Applicant: Yunlong Sun , Weisheng Lei , Hisashi Matsumoto , Brian Johansen , Gregg Hardy , Brian Baird
- Applicant Address: US OR Portland
- Assignee: Electro Scientific Industries, Inc.
- Current Assignee: Electro Scientific Industries, Inc.
- Current Assignee Address: US OR Portland
- Agent Patrick F Leonard
- Main IPC: B23K26/38
- IPC: B23K26/38

Abstract:
An improved method and apparatus for drilling vias in electronic substrates with laser pulses is presented which uses one or more tailored pulses to reduce debris remaining in the via while maintaining system throughput and avoiding damage to the substrate. A tailored pulse is a laser pulse that features a power spike having a peak power 10% higher than the average power of the pulse and lasting less than 50% of the duration of the pulse. Methods and apparatuses for creating tailored pulses by slicing longer duration pulses are shown.
Public/Granted literature
- US20090236323A1 METHOD AND APPARATUS FOR LASER DRILLING HOLES WITH TAILORED LASER PULSES Public/Granted day:2009-09-24
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