发明授权
US07985959B2 Self-aligned vertical bipolar junction transistor for phase change memories
有权
用于相变存储器的自对准垂直双极结型晶体管
- 专利标题: Self-aligned vertical bipolar junction transistor for phase change memories
- 专利标题(中): 用于相变存储器的自对准垂直双极结型晶体管
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申请号: US12218171申请日: 2008-07-11
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公开(公告)号: US07985959B2公开(公告)日: 2011-07-26
- 发明人: Michele Magistretti , Fabio Pellizzer , Augusto Benvenuti , Marcello Mariani
- 申请人: Michele Magistretti , Fabio Pellizzer , Augusto Benvenuti , Marcello Mariani
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Trop, Pruner & Hu, P.C.
- 主分类号: H01L29/02
- IPC分类号: H01L29/02 ; H01L27/082
摘要:
A phase change memory may include self-aligned polysilicon vertical bipolar junction transistors used as select devices. The bipolar junction transistors may be formed with double shallow trench isolation. For example, the emitters of each bipolar transistor may be defined by a first set of parallel trenches in one direction and a second set of parallel trenches in the opposite direction. In some embodiments, the formation of parasitic PNP transistors between adjacent emitters may be avoided.
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