发明授权
- 专利标题: Semiconductor device having metal thin film resistance element
- 专利标题(中): 具有金属薄膜电阻元件的半导体器件
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申请号: US11792471申请日: 2006-09-21
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公开(公告)号: US07986028B2公开(公告)日: 2011-07-26
- 发明人: Kimihiko Yamashita , Yasunori Hashimoto
- 申请人: Kimihiko Yamashita , Yasunori Hashimoto
- 申请人地址: JP Tokyo
- 专利权人: Ricoh Company, Ltd.
- 当前专利权人: Ricoh Company, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Cooper & Dunham LLP
- 优先权: JP2005-299767 20051014
- 国际申请: PCT/JP2006/319231 WO 20060921
- 国际公布: WO2007/043340 WO 20070419
- 主分类号: H01L29/00
- IPC分类号: H01L29/00
摘要:
A semiconductor device, includes a lower layer side insulation film; a wiring pattern formed on the lower layer side insulation film; a base insulation film formed on the lower layer side insulation film and the wiring pattern; and a plurality of metal thin film resistance elements formed on the base insulation film; wherein a connection hole is formed in the base insulation film on the wiring pattern; the wiring pattern and the metal thin film resistance element are electrically connected in the connection hole; the metal thin film resistance element has a belt shape part arranged separately from the connection hole and a connection part continuously formed with the belt shape part and connected to the wiring pattern in the connection hole; and the connection parts of at least two of the metal thin film resistance element are formed in the single connection hole with a gap in between said connection parts.
公开/授权文献
- US20080100348A1 Semiconductor Device 公开/授权日:2008-05-01
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