Invention Grant
- Patent Title: Three dimensional profile inspecting apparatus
- Patent Title (中): 三维轮廓检查装置
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Application No.: US12463407Application Date: 2009-05-10
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Publication No.: US07986402B2Publication Date: 2011-07-26
- Inventor: Wei Cheng Wang , Shih Hsuan Kuo , Jin Liang Chen
- Applicant: Wei Cheng Wang , Shih Hsuan Kuo , Jin Liang Chen
- Applicant Address: TW Chutung, Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Chutung, Hsinchu
- Agency: Egbert Law Offices PLLC
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01B11/24

Abstract:
A three-dimensional profile inspecting apparatus includes at least two optical inspecting apparatuses and a tilt angle adjusting mechanism. The tilt angle adjusting mechanism is equipped with the at least two optical inspecting apparatuses so as to adjust the tilt angles of the at least two optical inspecting apparatuses. When the tilt angles of the optical inspecting apparatuses are changed, the focuses of the optical inspecting apparatuses remain at a single position and a subject to be inspected is within the fields of view of the optical inspecting apparatuses. The three-dimensional profile of the subject can be obtained by building the images collected by the two optical inspecting apparatuses.
Public/Granted literature
- US20100128285A1 THREE DIMENSIONAL PROFILE INSPECTING APPARATUS Public/Granted day:2010-05-27
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