发明授权
- 专利标题: Method for continuous atmospheric pressure plasma treatment of workpieces
- 专利标题(中): 连续大气压等离子体处理工件的方法
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申请号: US11993095申请日: 2006-06-19
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公开(公告)号: US07989034B2公开(公告)日: 2011-08-02
- 发明人: Eckhard Prinz , Peter Palm , Frank Forster
- 申请人: Eckhard Prinz , Peter Palm , Frank Forster
- 申请人地址: DE Hamburg
- 专利权人: Softal Corona & Plasma GmbH
- 当前专利权人: Softal Corona & Plasma GmbH
- 当前专利权人地址: DE Hamburg
- 代理机构: Sand & Sebolt
- 优先权: DE102005029360 20050624
- 国际申请: PCT/EP2006/005838 WO 20060619
- 国际公布: WO2007/000255 WO 20070104
- 主分类号: C23C16/50
- IPC分类号: C23C16/50
摘要:
A method for continuous atmospheric plasma treatment of an electrically insulating workpiece. The workpiece is arranged at a distance beneath at least one high-voltage electrode which extends across a direction of movement. The electrode and the workpiece are set in motion relative to one another. The high voltage being applied to the high-voltage electrode, preferably is in the form of an AC voltage. A first space situated between the high-voltage electrode and the workpiece is filled with a first atmosphere and a second space on the side of the workpiece facing away from the high-voltage electrode is filled with a second atmosphere that is different from the first atmosphere. The second space is adjacent to a back side of the workpiece. The choice of high voltage and of the first and second atmospheres is made in such a way that a plasma discharge is ignited in the second atmosphere.
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