公开(公告)号：US07989034B2

公开(公告)日：2011-08-02

申请号：US11993095

申请日：2006-06-19

申请人： Eckhard Prinz ,  Peter Palm ,  Frank Forster

发明人： Eckhard Prinz ,  Peter Palm ,  Frank Forster

IPC分类号： C23C16/50

CPC分类号： H01J37/32348 ,  C23C16/50 ,  C23C16/545 ,  H05H1/2406 ,  H05H2001/2418 ,  H05H2001/2437

摘要： A method for continuous atmospheric plasma treatment of an electrically insulating workpiece. The workpiece is arranged at a distance beneath at least one high-voltage electrode which extends across a direction of movement. The electrode and the workpiece are set in motion relative to one another. The high voltage being applied to the high-voltage electrode, preferably is in the form of an AC voltage. A first space situated between the high-voltage electrode and the workpiece is filled with a first atmosphere and a second space on the side of the workpiece facing away from the high-voltage electrode is filled with a second atmosphere that is different from the first atmosphere. The second space is adjacent to a back side of the workpiece. The choice of high voltage and of the first and second atmospheres is made in such a way that a plasma discharge is ignited in the second atmosphere.

摘要翻译： 一种用于连续大气等离子体处理电绝缘工件的方法。 工件被布置在穿过运动方向延伸的至少一个高压电极下方的距离处。 电极和工件相对于彼此设置成运动。 施加到高电压电极的高电压优选为交流电压的形式。 位于高压电极和工件之间的第一空间填充有第一气氛，并且在远离高压电极的工件侧面上的第二空间填充有与第一气氛不同的第二气氛 。 第二空间与工件的背面相邻。 第一和第二气氛的选择以等离子体放电在第二气氛中点燃的方式进行。