Invention Grant
US07989859B2 Backside illuminated imaging sensor with silicide light reflecting layer
有权
具有硅化物光反射层的背面照明成像传感器
- Patent Title: Backside illuminated imaging sensor with silicide light reflecting layer
- Patent Title (中): 具有硅化物光反射层的背面照明成像传感器
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Application No.: US12142678Application Date: 2008-06-19
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Publication No.: US07989859B2Publication Date: 2011-08-02
- Inventor: Duli Mao , Hsin-Chih Tai , Vincent Venezia , Howard E. Rhodes
- Applicant: Duli Mao , Hsin-Chih Tai , Vincent Venezia , Howard E. Rhodes
- Applicant Address: US CA Sunnyvale
- Assignee: OmniVision Technologies, Inc.
- Current Assignee: OmniVision Technologies, Inc.
- Current Assignee Address: US CA Sunnyvale
- Agency: Blakely Sokoloff Taylor & Zafman LLP
- Main IPC: H01L31/062
- IPC: H01L31/062

Abstract:
A backside illuminated imaging sensor includes a semiconductor layer, a metal interconnect layer and a silicide light reflecting layer. The semiconductor layer has a front surface and a back surface. An imaging pixel that includes a photodiode region is formed within the semiconductor layer. The metal interconnect layer is electrically coupled to the photodiode region and the silicide light reflecting layer is coupled between the metal interconnect layer and the front surface of the semiconductor layer. In operation, the photodiode region receives light from the back surface of the semiconductor layer, where a portion of the received light propagates through the photodiode region to the silicide light reflecting layer. The silicide light reflecting layer is configured to reflect the portion of light received from the photodiode region.
Public/Granted literature
- US20090200586A1 BACKSIDE ILLUMINATED IMAGING SENSOR WITH SILICIDE LIGHT REFLECTING LAYER Public/Granted day:2009-08-13
Information query
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