Invention Grant
US07994014B2 Semiconductor devices having faceted silicide contacts, and related fabrication methods 有权
具有多面体硅化物接触的半导体器件及相关制造方法

Semiconductor devices having faceted silicide contacts, and related fabrication methods
Abstract:
The disclosed subject matter relates to semiconductor transistor devices and associated fabrication techniques that can be utilized to form silicide contacts having an increased effective size, relative to conventional silicide contacts. A semiconductor device fabricated in accordance with the processes disclosed herein includes a layer of semiconductor material and a gate structure overlying the layer of semiconductor material. A channel region is formed in the layer of semiconductor material, the channel region underlying the gate structure. The semiconductor device also includes source and drain regions in the layer of semiconductor material, wherein the channel region is located between the source and drain regions. Moreover, the semiconductor device includes facet-shaped silicide contact areas overlying the source and drain regions.
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