Invention Grant
US07994014B2 Semiconductor devices having faceted silicide contacts, and related fabrication methods
有权
具有多面体硅化物接触的半导体器件及相关制造方法
- Patent Title: Semiconductor devices having faceted silicide contacts, and related fabrication methods
- Patent Title (中): 具有多面体硅化物接触的半导体器件及相关制造方法
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Application No.: US12249570Application Date: 2008-10-10
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Publication No.: US07994014B2Publication Date: 2011-08-09
- Inventor: Frank Bin Yang , Rohit Pal , Michael J. Hargrove
- Applicant: Frank Bin Yang , Rohit Pal , Michael J. Hargrove
- Applicant Address: US TX Austin
- Assignee: Advanced Micro Devices, Inc.
- Current Assignee: Advanced Micro Devices, Inc.
- Current Assignee Address: US TX Austin
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
The disclosed subject matter relates to semiconductor transistor devices and associated fabrication techniques that can be utilized to form silicide contacts having an increased effective size, relative to conventional silicide contacts. A semiconductor device fabricated in accordance with the processes disclosed herein includes a layer of semiconductor material and a gate structure overlying the layer of semiconductor material. A channel region is formed in the layer of semiconductor material, the channel region underlying the gate structure. The semiconductor device also includes source and drain regions in the layer of semiconductor material, wherein the channel region is located between the source and drain regions. Moreover, the semiconductor device includes facet-shaped silicide contact areas overlying the source and drain regions.
Public/Granted literature
- US20100090289A1 SEMICONDUCTOR DEVICES HAVING FACETED SILICIDE CONTACTS, AND RELATED FABRICATION METHODS Public/Granted day:2010-04-15
Information query
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