发明授权
- 专利标题： Structure and method for thin film device with stranded conductor
- 专利标题（中）： 具有绞线的薄膜器件的结构和方法
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申请号： US11264321申请日： 2005-11-01
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公开(公告)号： US07994509B2公开(公告)日： 2011-08-09
- 发明人: Ping Mei , Hao Luo , Carl Taussig
- 申请人： Ping Mei , Hao Luo , Carl Taussig
- 申请人地址： US TX Houston
- 专利权人： Hewlett-Packard Development Company, L.P.
- 当前专利权人： Hewlett-Packard Development Company, L.P.
- 当前专利权人地址： US TX Houston
- 主分类号： H01L29/10
- IPC分类号： H01L29/10
摘要：
Provided is a thin film device and an associated method of making a thin film device. For example, fabrication of an inverter thin film device is described. Moreover, a parallel spaced electrically conductive strips are provided upon a substrate. A functional material is deposited upon the conductive strips. A 3D structure is then provided upon the functional material, the 3D structure having a plurality of different heights, at least one height defining a first portion of the conductive strips to be bundled. The 3D structure and functional material are then etched to define a TFD disposed above the first portion of the conductive strips. The first portion of the conductive strips is bundled adjacent to the TFD.
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