A semiconductor device of the present invention comprises a logic circuit to which a power supply voltage, a sub-power supply voltage, a ground voltage and a sub-ground voltage are supplied; a driver for generating the sub-power supply voltage and the sub-ground voltage based on the power supply voltage and the ground voltage; a first wiring layer including a sub-power supply line for supplying the sub-power supply voltage and a sub-ground line for supplying the sub-ground voltage; a second wiring layer including source/drain lines for MOS transistors; a third wiring layer including a main power supply line for supplying the power supply voltage and a main ground line for supplying the ground voltage and arranged opposite to the first wiring layer to sandwich the second wiring layer; via structures for connecting the source/drain lines of the second wiring layer to the other layers.