A process is provided for the formation of miniaturized getter deposits, comprising the steps of forming a layer of a photosensitive polymeric material on a support; selectively exposing the polymeric layer in order to cause a chemical modification in a portion of the polymeric layer; removing with a first solvent only one of the previously exposed or the not previously exposed portions of the polymeric layer, thus forming cavities in the polymeric layer; forming a thin layer of a getter material by cathodic deposition at the bottom of the cavity and on the residual polymer; and removing with a second solvent the polymer portion not removed by the first solvent, leaving at least a getter material deposit on the support surface.