发明授权
- 专利标题: Semiconductor device and method for manufacturing the same
- 专利标题(中): 半导体装置及其制造方法
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申请号: US12821703申请日: 2010-06-23
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公开(公告)号: US07998839B2公开(公告)日: 2011-08-16
- 发明人: Hiroyuki Chibahara , Atsushi Ishii , Naoki Izumi , Masahiro Matsumoto
- 申请人: Hiroyuki Chibahara , Atsushi Ishii , Naoki Izumi , Masahiro Matsumoto
- 申请人地址: JP Kanagawa
- 专利权人: Renesas Electronics Corporation
- 当前专利权人: Renesas Electronics Corporation
- 当前专利权人地址: JP Kanagawa
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2008-142872 20080530
- 主分类号: H01L21/46
- IPC分类号: H01L21/46
摘要:
A semiconductor device wherein destruction of a sealing ring caused by cracking of an interlayer dielectric film is difficult to occur, as well as a method for manufacturing the semiconductor device, are provided. A first laminate comprises first interlayer dielectric films having a first mechanical strength. A second laminate comprises second interlayer dielectric films having a mechanical strength higher than the first mechanical strength. A first region includes first metallic layers and vias provided within the first laminate. A second region includes second metallic layers and vias provided within the second laminate. When seen in plan, the second region overlaps at least a part of the first region, is not coupled with the first region by vias, and sandwiches the second interlayer dielectric film between it and the first region.
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