发明授权
- 专利标题: Method for manufacturing a perpendicular magnetic write pole using an electrical lapping guide for tight write pole flare point control
- 专利标题(中): 使用电研磨引导件制造垂直写磁极的方法,用于紧密写入磁极点光斑控制
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申请号: US12023892申请日: 2008-01-31
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公开(公告)号: US08003304B2公开(公告)日: 2011-08-23
- 发明人: Vladimir Nikitin , Yi Zheng
- 申请人: Vladimir Nikitin , Yi Zheng
- 申请人地址: NL Amsterdam
- 专利权人: Hitachi Global Storage Technologies Netherlands B.V.
- 当前专利权人: Hitachi Global Storage Technologies Netherlands B.V.
- 当前专利权人地址: NL Amsterdam
- 代理机构: Zilka-Kotab, PC
- 主分类号: G11B5/127
- IPC分类号: G11B5/127
摘要:
A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method provides for accurate definition of a device feature such as a write pole flare point. A functional lapping guide is formed to determine when a lapping operation should be terminated to define an air bearing surface of a slider. In order to provide accurate compensation for manufacturing variations in the functional lapping guide, a dummy lapping guide is provided. An amount of variation of a front edge of the dummy lapping guide, which is defined by the same process step as a writer pole flare point, can be calculated by measuring the width (stripe height) of the dummy lapping guide based on its electrical resistance. Since the back edges of the dummy lapping guide and functional lapping guide are defined by the same manufacturing steps, the back edge of the functional lapping guide can then be determined, and used for accurately control of the writer flare point through their correlation established from the dummy lapping guide.
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