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    METHOD OF MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD WITH STEPPED TRAILING MAGNETIC SHIELD WITH ELECTRICAL LAPPING GUIDE CONTROL
    1.
    发明申请
    METHOD OF MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD WITH STEPPED TRAILING MAGNETIC SHIELD WITH ELECTRICAL LAPPING GUIDE CONTROL 有权
    使用带电导线控制的步进式磁屏蔽制造全磁性写磁头的方法

    公开(公告)号：US20090152235A1

    公开(公告)日：2009-06-18

    申请号：US11956292

    申请日：2007-12-13

    申请人： Wen-Chien David Hsiao ,  Hieu Lam ,  Vladimir Nikitin ,  Sue Siyang Zhang ,  Yi Zheng

    发明人： Wen-Chien David Hsiao ,  Hieu Lam ,  Vladimir Nikitin ,  Sue Siyang Zhang ,  Yi Zheng

    IPC分类号： B44C1/22

    CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3166 ,  G11B5/3169

    摘要： A method for manufacturing a magnetic write head having a stepped trailing shield. The stepped trailing shield is formed by forming a non-magnetic bump over a write pole prior to electroplating a wrap-around magnetic shield. The method allows the location of the front edge of the bump relative to the back edge of the wrap-around shield to be monitored by measuring the electrical resistance of an electrical lapping guide formed concurrently with these features. This concurrent formation of a lapping guide can be used to define the relative location of other features as well, such as the location of a back edge of a wrap-around shield relative to a flare point of a write pole.

    摘要翻译： 一种用于制造具有阶梯式后挡板的磁写头的方法。 在电镀环绕磁屏蔽之前，通过在写入极上形成非磁性凸块来形成阶梯式后屏蔽。 该方法允许通过测量与这些特征同时形成的电研磨引导件的电阻来监测凸块的前边缘相对于环绕护罩的后边缘的位置。 研磨引导件的这种同时形成也可以用于限定其它特征的相对位置，例如环绕屏蔽件的后边缘相对于写入极点的扩张点的位置。

    Method for manufacturing a perpendicular magnetic write pole using an electrical lapping guide for tight write pole flare point control
    3.
    发明授权
    Method for manufacturing a perpendicular magnetic write pole using an electrical lapping guide for tight write pole flare point control 有权
    使用电研磨引导件制造垂直写磁极的方法，用于紧密写入磁极点光斑控制

    公开(公告)号：US08003304B2

    公开(公告)日：2011-08-23

    申请号：US12023892

    申请日：2008-01-31

    申请人： Vladimir Nikitin ,  Yi Zheng

    发明人： Vladimir Nikitin ,  Yi Zheng

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3166 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3169 ,  Y10T29/49036 ,  Y10T29/49037 ,  Y10T29/49046

    摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method provides for accurate definition of a device feature such as a write pole flare point. A functional lapping guide is formed to determine when a lapping operation should be terminated to define an air bearing surface of a slider. In order to provide accurate compensation for manufacturing variations in the functional lapping guide, a dummy lapping guide is provided. An amount of variation of a front edge of the dummy lapping guide, which is defined by the same process step as a writer pole flare point, can be calculated by measuring the width (stripe height) of the dummy lapping guide based on its electrical resistance. Since the back edges of the dummy lapping guide and functional lapping guide are defined by the same manufacturing steps, the back edge of the functional lapping guide can then be determined, and used for accurately control of the writer flare point through their correlation established from the dummy lapping guide.

    摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法提供了诸如写极点闪光点的设备特征的精确定义。 形成功能研磨引导件以确定何时应当终止研磨操作以限定滑块的空气轴承表面。 为了对功能研磨导轨的制造变化提供准确的补偿，提供了一个虚拟研磨导轨。 可以通过测量基于其电阻的虚拟研磨导轨的宽度（条带高度）来计算由研磨引导件的相同工艺步骤限定的假研磨引导件的前边缘的变化量， 。 由于仿真研磨引导件和功能性研磨引导件的后边缘由相同的制造步骤限定，因此可以确定功能研磨导向件的后边缘，并且用于通过其从 虚拟研磨指南。

    Method of manufacturing a perpendicular magnetic write head having a wrap-around trailing shield and a concave trailing edge main pole
    4.
    发明授权
    Method of manufacturing a perpendicular magnetic write head having a wrap-around trailing shield and a concave trailing edge main pole 有权
    制造具有环绕后挡板和凹后缘主极的垂直磁写头的方法

    公开(公告)号：US07506431B2

    公开(公告)日：2009-03-24

    申请号：US11744022

    申请日：2007-05-03

    申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

    发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

    IPC分类号： G11B5/127 ,  H04R31/00

    CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method allows the write head to be formed with a write pole having a concave trailing edge. The method further allows the amount of concavity of the trailing edge to be accurately and carefully controlled both within a wafer and between wafers. A write pole is formed using a mask that includes a hard mask, a RIEable layer and an endpoint detection layer. A layer of non-magnetic material (ALD layer) is deposited, and then, an ion milling process is used to remove a portion of the ALD layer disposed over the write pole and mask. A reactive ion etch process is performed to remove the RIEable layer leaving the ALD layer to form non-magnetic side walls with upper portions that extend above the write pole. Another ion milling is then performed, preferably at an angle relative to normal, such that shadowing from the upper portions of the non-magnetic side walls causes the ion milling to form the write pole with a concave trailing edge.

    摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法允许写头形成有具有凹形后缘的写入极。 该方法还允许在晶片内和晶片之间精确地和仔细地控制后缘的凹陷量。 使用包括硬掩模，RIEable层和端点检测层的掩模形成写入极。 沉积一层非磁性材料（ALD层），然后使用离子铣削工艺去除设置在写入极和掩模上的ALD层的一部分。 执行反应离子蚀刻工艺以去除离开ALD层的RIEable层以形成非磁性侧壁，其上部在写极上方延伸。 然后进行另一个离子铣削，优选以相对于法线成一角度，使得来自非磁性侧壁的上部的阴影使得离子铣削形成具有凹形后缘的写入极。

    METHOD OF MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD HAVING A WRAP-AROUND TRAILING SHIELD AND A CONCAVE TRAILING EDGE MAIN POLE
    5.
    发明申请
    METHOD OF MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD HAVING A WRAP-AROUND TRAILING SHIELD AND A CONCAVE TRAILING EDGE MAIN POLE 有权
    制造具有缠绕护栏和凹凸条纹边缘的普通磁性写头的方法

    公开(公告)号：US20080271308A1

    公开(公告)日：2008-11-06

    申请号：US11744022

    申请日：2007-05-03

    申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

    发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

    IPC分类号： G11B5/127 ,  C23C14/00

    CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method allows the write head to be formed with a write pole having a concave trailing edge. The method further allows the amount of concavity of the trailing edge to be accurately and carefully controlled both within a wafer and between wafers. A write pole is formed using a mask that includes a hard mask, a RIEable layer and an endpoint detection layer. A layer of non-magnetic material (ALD layer) h deposited, and then, an ion milling process is used to remove a portion of the ALD layer disposed over the write pole and mask. A reactive ion etch process is performed to remove the RIEable layer leaving the ALD layer to form non-magnetic side walls with upper portions that extend above the write pole. Another ion milling is then performed, preferably at an angle relative to normal, such that shadowing from the upper portions of the non-magnetic side walls causes the ion milling to form the write pole with a concave trailing edge.

    摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法允许写头形成有具有凹形后缘的写入极。 该方法还允许在晶片内和晶片之间精确地和仔细地控制后缘的凹陷量。 使用包括硬掩模，RIEable层和端点检测层的掩模形成写入极。 沉积一层非磁性材料（ALD层），然后使用离子铣削工艺去除设置在写入极和掩模上的一部分ALD层。 执行反应离子蚀刻工艺以去除离开ALD层的RIEable层以形成非磁性侧壁，其上部在写极上方延伸。 然后进行另一个离子铣削，优选以相对于法线成一角度，使得来自非磁性侧壁的上部的阴影使得离子铣削形成具有凹形后缘的写入极。

    Perpendicular magnetic write head having a magnetic write pole with a concave trailing edge
    7.
    发明授权
    Perpendicular magnetic write head having a magnetic write pole with a concave trailing edge 有权
    具有磁写入磁极的垂直磁性写头具有凹形后缘

    公开(公告)号：US07576951B2

    公开(公告)日：2009-08-18

    申请号：US11411556

    申请日：2006-04-25

    申请人： Donald G. Allen ,  Amanda Baer ,  Michael Feldbaum ,  Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Yinshi Liu ,  Aaron Neuhaus ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

    发明人： Donald G. Allen ,  Amanda Baer ,  Michael Feldbaum ,  Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Yinshi Liu ,  Aaron Neuhaus ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3116 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/1871 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

    摘要： A magnetic write head for perpendicular magnetic recording having a write pole with a concave trailing edge. The magnetic write pole can have a trapezoidal shape with first and second laterally opposed sides that are further apart at the trailing edge than at the leading edge. The write head may or may not include a magnetic trailing shield, and if a trailing shield is included it is separated from the trailing edge by a non-magnetic write gap layer. The concave trailing edge improves magnetic performance such as by improving the transition curvature. A method for constructing the write head includes forming a magnetic write pole by forming a mask structure over a deposited write pole material, the mask structure having an alumina hard mask and an image transfer layer such as DURAMIDE®. An alumina fill layer is then deposited and a chemical mechanical polish is performed to open up the image transfer layer. A reactive on etch is performed to remove the image transfer layer and a reactive ion mill or reactive ion etch is performed to remove the alumina hard mask and form a concave surface on the write pole.

    摘要翻译： 用于垂直磁记录的磁写头，具有带有凹后缘的写极。 磁性写入极可以具有梯形形状，其中第一和第二横向相对侧在后缘处比在前缘处更远地分开。 写头可以包括或可以不包括磁性后屏蔽，并且如果包括后屏蔽，则其通过非磁性写间隙层与后缘分离。 凹形后边缘提高磁性能，例如通过改善转变曲率。 构成写入头的方法包括通过在沉积的写入极材料上形成掩模结构来形成磁性写入极，掩模结构具有氧化铝硬掩模和诸如DURAMIDE的图像转移层。 然后沉积氧化铝填充层，并执行化学机械抛光以打开图像转印层。 执行反应性蚀刻以去除图像转印层，并且执行反应性离子磨或反应离子蚀刻以除去氧化铝硬掩模并在写入极上形成凹面。

    Perpendicular magnetic write head having a wrap around trailing shield with a flux return path
    9.
    发明申请
    Perpendicular magnetic write head having a wrap around trailing shield with a flux return path 审中-公开
    垂直磁性写头，具有带有通量返回路径的后挡板的包裹物

    公开(公告)号：US20080112088A1

    公开(公告)日：2008-05-15

    申请号：US11598417

    申请日：2006-11-13

    申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Edward Hin Pong Lee ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

    发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Edward Hin Pong Lee ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

    IPC分类号： G11B5/33

    CPC分类号： G11B5/1278 ,  G11B5/11

    摘要： A magnetic write head for perpendicular magnetic recording that has write pole, a return pole and a trailing shield that is magnetically connected with magnetic return pole. The write head includes a magnetic pedestal and first and second magnetic studs that connect the trailing shield with the pedestal. The studs are laterally spaced a distance that is not greater than 5 um from the nearest side of the write pole. In other words, the studs are spaced from each other a distance that is no greater than the width of the leading edge of the write pole plus 10 um. This spacing of the studs prevents saturation of the trailing shield, maximizing field gradient and ensuring optimal magnetic write performance.

    摘要翻译： 用于垂直磁记录的磁头，具有写磁极，与磁返回极磁性连接的返回极和后屏蔽。 写头包括一个磁性基座和将尾部屏蔽与基座相连的第一和第二磁性螺柱。 螺柱横向间隔开距离写柱最近侧不超过5um的距离。 换句话说，螺柱彼此间隔开不大于写入极的前缘的宽度加上10um的距离。 螺栓的这种间距防止后挡板的饱和，使场梯度最大化并确保最佳磁写性能。