发明授权
US08003929B2 Solid-state image pickup device with an optical waveguide, method for manufacturing solid-state image pickup device, and camera
有权
具有光波导的固态图像拾取装置,固态图像拾取装置的制造方法和照相机
- 专利标题: Solid-state image pickup device with an optical waveguide, method for manufacturing solid-state image pickup device, and camera
- 专利标题(中): 具有光波导的固态图像拾取装置,固态图像拾取装置的制造方法和照相机
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申请号: US12579593申请日: 2009-10-15
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公开(公告)号: US08003929B2公开(公告)日: 2011-08-23
- 发明人: Yoshinori Toumiya , Keiji Tatani , Haruhiko Ajisawa , Yuji Inoue , Tetsuhiro Iwashita , Hideaki Kato
- 申请人: Yoshinori Toumiya , Keiji Tatani , Haruhiko Ajisawa , Yuji Inoue , Tetsuhiro Iwashita , Hideaki Kato
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: SNR Denton US LLP
- 优先权: JP2006-332421 20061208; JP2007-106900 20070416
- 主分类号: H01L27/00
- IPC分类号: H01L27/00 ; H01J3/14
摘要:
A solid-state image pickup device includes a plurality of pixels on a light-receiving surface, photodiodes disposed on the light-receiving surface of a semiconductor substrate while being partitioned on the pixel basis, signal transferring portions which are disposed on the semiconductor substrate and which read signal charges generated and stored in the photodiodes or voltages corresponding to the signal charges, insulating films disposed on the semiconductor substrate while covering the photodiodes, concave portions disposed in the insulating films, pad electrodes disposed on the insulating films, a passivation film which covers inner walls of the concave portions, which is disposed on the pad electrodes, and which has a refractive index higher than that of silicon oxide, and a core layer which is disposed on the passivation film while being filled in the concave portions and which has a refractive index higher than that of silicon oxide.
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