Invention Grant
- Patent Title: Multi-axis magnetic lens
- Patent Title (中): 多轴磁性镜头
-
Application No.: US12636007Application Date: 2009-12-11
-
Publication No.: US08003953B2Publication Date: 2011-08-23
- Inventor: Zhongwei Chen , Weiming Ren , Kenichi Kanai , Xuedong Liu
- Applicant: Zhongwei Chen , Weiming Ren , Kenichi Kanai , Xuedong Liu
- Applicant Address: TW Hsin-Chu
- Assignee: Hermes Microvision, Inc.
- Current Assignee: Hermes Microvision, Inc.
- Current Assignee Address: TW Hsin-Chu
- Agency: Stout, Uxa, Buyan & Mullins, LLP
- Main IPC: H01J1/50
- IPC: H01J1/50
Abstract:
The present invention relates to a multi-axis magnetic lens for a charged particle beam system. The apparatus eliminates the undesired non-axisymmetric transverse magnetic field components from the magnetic field generated by a common excitation coil and leaves the desired axisymmetric field for focusing each particle beam employed within the system.
Public/Granted literature
- US20110139996A1 MULTI-AXIS MAGNETIC LENS Public/Granted day:2011-06-16
Information query
