公开(公告)号：US20110139996A1

公开(公告)日：2011-06-16

申请号：US12636007

申请日：2009-12-11

申请人： ZHONGWEI CHEN ,  WEIMING REN ,  KENICHI KANAI ,  XUEDONG LIU

发明人： ZHONGWEI CHEN ,  WEIMING REN ,  KENICHI KANAI ,  XUEDONG LIU

IPC分类号： H01J1/50

CPC分类号： H01J37/141 ,  H01J2237/1405

摘要： The present invention relates to a multi-axis magnetic lens for a charged particle beam system. The apparatus eliminates the undesired non-axisymmetric transverse magnetic field components from the magnetic field generated by a common excitation coil and leaves the desired axisymmetric field for focusing each particle beam employed within the system.

摘要翻译： 本发明涉及带电粒子束系统的多轴磁透镜。 该装置从由公共的励磁线圈产生的磁场中消除不期望的非轴对称的横向磁场分量，并且留下用于聚焦在系统内采用的每个粒子束的期望的轴对称场。

公开(公告)号：US06566897B2

公开(公告)日：2003-05-20

申请号：US10033845

申请日：2001-12-27

申请人： Chiwoei Wayne Lo ,  Kenichi Kanai

发明人： Chiwoei Wayne Lo ,  Kenichi Kanai

IPC分类号： G01R31305

CPC分类号： G01R31/307 ,  H01J2237/2594 ,  H01J2237/2817 ,  Y10S977/849

摘要： Defects in a patterned substrate are detected by inspection with a charged particle beam inspection tool which generates an image of a portion of the patterned substrate and compares the image with a reference in order to identify any defects in the patterned substrate. Parameters of the tool are optimized to improve image uniformity and contrast, particularly voltage contrast. Prior to imaging an area of the substrate, the tool charges an area surrounding the image area to eliminate or reduce the effects caused by asymmetrical charging in the surrounding area. The tool alternates between charging the surrounding area and imaging the image area to produce a plurality of images of the image area, which are then averaged. The result is a highly uniform image with improved contrast for accurate defect detection.

公开(公告)号：US4995490A

公开(公告)日：1991-02-26

申请号：US405093

申请日：1989-09-08

申请人： Kenichi Kanai

发明人： Kenichi Kanai

IPC分类号： F16D41/06 ,  F16D41/067

CPC分类号： F16D41/067

摘要： A roller-synchronized one-way clutch assembly includes a ring-shaped first retainer element, a ring-shaped second retainer element, a plurality of rollers and at least one spring extending between the first and second retainer elements. In the preferred embodiment, each of the first and second retainer elements is generally U-shaped and different in size and one of the first and second retainer elements is received in a U-shaped channel of the other. The first and second retainer elements are operatively coupled together such that they may move relative to each other in a circumferential direction over a predetermined angle. Alll of the rollers are movably supported by a retainer sub-assembly to provide a complete full phase function.

摘要翻译： 辊同步单向离合器组件包括环形第一保持器元件，环形第二保持器元件，多个辊子和在第一和第二保持器元件之间延伸的至少一个弹簧。 在优选实施例中，第一和第二保持器元件中的每一个大体上为U形并且尺寸不同，并且第一和第二保持器元件中的一个被容纳在另一个的U形通道中。 第一和第二保持器元件可操作地联接在一起，使得它们可以在圆周方向上相对于彼此在预定角度上移动。 所有的辊都由保持器子组件可移动地支撑，以提供完整的全相功能。

公开(公告)号：US08908348B2

公开(公告)日：2014-12-09

申请号：US12552270

申请日：2009-09-01

申请人： Yi-Xiang Wang ,  Juying Dou ,  Kenichi Kanai

发明人： Yi-Xiang Wang ,  Juying Dou ,  Kenichi Kanai

IPC分类号： H01L21/683 ,  H01J37/317 ,  H01J37/20 ,  H01J37/28 ,  B82Y10/00 ,  B82Y40/00

CPC分类号： H01J37/20 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/28 ,  H01J37/3174 ,  H01J2237/0044 ,  H01J2237/2008

摘要： A wafer grounding apparatus and method adaptable to a charged particle beam apparatus is disclosed. A wafer substrate is supported by a wafer mount. A grounding pin is arranged to be in contact with a backside film formed on a backside of the wafer substrate. A grounding pulse generator provides at least one pulse to drive the grounding pin such that dielectric breakdown occurring at the backside film leads to establishment of a current path through the backside films. Accordingly, a current flows in the wafer substrate through this current path and then flows out of the wafer substrate via at least one current return path formed from capacitive coupling between the wafer substrate and the wafer mount.

摘要翻译： 公开了适用于带电粒子束装置的晶片接地装置和方法。 晶片基板由晶片支架支撑。 接地销布置成与形成在晶片衬底的背面上的背面膜接触。 接地脉冲发生器提供至少一个脉冲来驱动接地引脚，使得在背面薄膜处发生的电介质击穿导致建立通过背面薄膜的电流路径。 因此，电流通过该电流路径流过晶片衬底，然后通过由晶片衬底和晶片座之间的电容耦合形成的至少一个电流返回路径流出晶片衬底。

公开(公告)号：US08445862B2

公开(公告)日：2013-05-21

申请号：US12968221

申请日：2010-12-14

申请人： Zhongwei Chen ,  Weiming Ren ,  Kenichi Kanai ,  Xuedong Liu

发明人： Zhongwei Chen ,  Weiming Ren ,  Kenichi Kanai ,  Xuedong Liu

IPC分类号： H01J37/143

CPC分类号： H01J37/141 ,  H01J37/28 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/1534

摘要： An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens. In the apparatus, some additional magnetic shielding measures such as magnetic shielding tubes, plates and house are used to eliminate the non-axisymmetric transverse field on the charged particle path from each charged particle source to the entrance of each sub-lens and from the exit of each sub-lens to the sample surface.

摘要翻译： 设备基本上使用简单紧凑的多轴磁性透镜来同时将多个带电粒子束中的每一个聚焦在样品表面上。 在多轴磁性透镜的每个子透镜模块中，两个磁环分别插入具有非磁性径向间隙的上孔和下孔中。 每个间隙尺寸足够小以保持足够的磁耦合并且足够大以在靠近其光轴的空间中获得足够的磁标势电位分布的轴向对称性。 该方法同时消除了每个子透镜中的非轴对称横向场和所有子透镜之间的圆透镜场差; 都存在于传统的多轴磁性透镜中。 在该装置中，使用一些额外的磁屏蔽措施，例如磁屏蔽管，板和房子来消除带电粒子路径上从每个带电粒子源到每个子透镜的入口和从出口的入口处的非轴对称横向场 每个子透镜到样品表面。

公开(公告)号：US08003953B2

公开(公告)日：2011-08-23

申请号：US12636007

申请日：2009-12-11

申请人： Zhongwei Chen ,  Weiming Ren ,  Kenichi Kanai ,  Xuedong Liu

发明人： Zhongwei Chen ,  Weiming Ren ,  Kenichi Kanai ,  Xuedong Liu

IPC分类号： H01J1/50

CPC分类号： H01J37/141 ,  H01J2237/1405

摘要： The present invention relates to a multi-axis magnetic lens for a charged particle beam system. The apparatus eliminates the undesired non-axisymmetric transverse magnetic field components from the magnetic field generated by a common excitation coil and leaves the desired axisymmetric field for focusing each particle beam employed within the system.

摘要翻译： 本发明涉及带电粒子束系统的多轴磁透镜。 该装置从由公共的励磁线圈产生的磁场中消除不期望的非轴对称的横向磁场分量，并且留下用于聚焦在系统内采用的每个粒子束的期望的轴对称场。

公开(公告)号：US07982186B2

公开(公告)日：2011-07-19

申请号：US12416047

申请日：2009-03-31

申请人： Kenichi Kanai ,  Yan Zhao

发明人： Kenichi Kanai ,  Yan Zhao

IPC分类号： G21K7/00

CPC分类号： H01J37/20 ,  H01J37/28 ,  H01J2237/20221 ,  H01J2237/2817

摘要： A method of raster scanning a sample on a continuously moving stage for charged-particle beam imaging said sample is disclosed. The method includes line scanning a charged-particle beam across a surface of the sample repeatedly to form on the surface at least one 2-dimensional line array composed of scan lines lying adjacent to each other. When each line scan is to be performed, the charged-particle beam is shifted, along the stage-moving direction, by an extra predefined distance at least equal to a distance the stage has traveled during a time period from the beginning of the first line scan of the first formed line array to the beginning of the current line scan (to be performed) of the current line array (to be formed).

摘要翻译： 公开了一种在用于带电粒子束成像的连续移动台上光栅扫描样品的方法。 该方法包括重复地扫描样品表面上的带电粒子束，以在表面上形成由彼此相邻的扫描线组成的至少一个二维线阵列。 当要执行每行扫描时，带电粒子束沿着载物台移动方向被移动至少等于在从第一行开始的时间段内的平台行进的距离的额外的预定距离 将第一形成的线阵列扫描到当前行阵列（待形成）的当前行扫描（待执行）的开头。

公开(公告)号：US06344750B1

公开(公告)日：2002-02-05

申请号：US09227395

申请日：1999-01-08

申请人： Chiwoei Wayne Lo ,  Kenichi Kanai

发明人： Chiwoei Wayne Lo ,  Kenichi Kanai

IPC分类号： G01R31305

CPC分类号： G01R31/307 ,  H01J2237/2594 ,  H01J2237/2817 ,  Y10S977/849

摘要： Defects in a patterned substrate are detected by inspection with a charged particle beam inspection tool which generates an image of a portion of the patterned substrate and compares the image with a reference in order to identify any defects in the patterned substrate. Parameters of the tool are optimized to improve image uniformity and contrast, particularly voltage contrast. Prior to imaging an area of the substrate, the tool charges an area surrounding the image area to eliminate or reduce the effects caused by asymmetrical charging in the surrounding area. The tool alternates between charging the surrounding area and imaging the image area to produce a plurality of images of the image area, which are then averaged. The result is a highly uniform image with improved contrast for accurate defect detection.

摘要翻译： 通过用带电粒子束检查工具进行检查来检测图案化衬底中的缺陷，其产生图案化衬底的一部分的图像，并将图像与参考值进行比较，以便识别图案化衬底中的任何缺陷。 该工具的参数被优化，以提高图像的均匀性和对比度，特别是电压对比度。 在对基板的区域进行成像之前，工具对图像区域周围的区域进行充电以消除或减少由周围区域中的不对称充电引起的影响。 该工具在对周围区域充电并对图像区域进行成像之间交替产生图像区域的多个图像，然后将其平均。 结果是高度均匀的图像，具有改进的对比度，用于精确的缺陷检测。

公开(公告)号：US5078243A

公开(公告)日：1992-01-07

申请号：US544238

申请日：1990-06-26

申请人： Kenichi Kanai ,  Hidetaka Nakano

发明人： Kenichi Kanai ,  Hidetaka Nakano

IPC分类号： F16D41/06 ,  F16D41/067

CPC分类号： F16D41/067

摘要： A one-way clutch of the unitary bearing type comprises a bearing portion in which one of an inner race and an outer race is axially extended relative to the other of the inner race and the outer race, and a one-way clutch portion fitted to the extended portion and using the extended portion in common as its own inner race or outer race. The one-way clutch portion includes a plurality of wedge elements and a cage for retaining the wedge elements. A first engagement member protruding from a portion of the cage is engaged with a first receiving portion provided in the inner race or the outer race of the one-way clutch portion, and a second engagement member protruding from the cage is engaged with a second receiving portion provided in the inner race or the outer race of the bearing portion.

摘要翻译： 单向轴承型的单向离合器包括：内圈和外座圈中的一个相对于内座圈和外座圈中的另一个轴向延伸的轴承部分，以及安装到 延伸部分并且使用延伸部分作为其自身的内圈或外圈共同作用。 单向离合器部分包括多个楔形元件和用于保持楔形元件的保持架。 从保持架的一部分突出的第一接合构件与设置在单向离合器部分的内圈或外座圈中的第一接收部分接合，并且从保持架突出的第二接合构件与第二接收部 部分设置在轴承部分的内圈或外圈中。

公开(公告)号：US20120145917A1

公开(公告)日：2012-06-14

申请号：US12968221

申请日：2010-12-14

申请人： ZHONGWEI CHEN ,  WEIMING REN ,  KENICHI KANAI ,  XUEDONG LIU

发明人： ZHONGWEI CHEN ,  WEIMING REN ,  KENICHI KANAI ,  XUEDONG LIU

IPC分类号： H01J3/32

CPC分类号： H01J37/141 ,  H01J37/28 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/1534

摘要： An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens. In the apparatus, some additional magnetic shielding measures such as magnetic shielding tubes, plates and house are used to eliminate the non-axisymmetric transverse field on the charged particle path from each charged particle source to the entrance of each sub-lens and from the exit of each sub-lens to the sample surface.