- 专利标题: Ion implantation with diminished scanning field effects
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申请号: US12338644申请日: 2008-12-18
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公开(公告)号: US08008636B2公开(公告)日: 2011-08-30
- 发明人: Edward C. Eisner
- 申请人: Edward C. Eisner
- 申请人地址: US MA Beverly
- 专利权人: Axcelis Technologies, Inc.
- 当前专利权人: Axcelis Technologies, Inc.
- 当前专利权人地址: US MA Beverly
- 代理机构: Eschweiler & Associates, LLC
- 主分类号: H01J37/317
- IPC分类号: H01J37/317 ; H01J376/256 ; H01J3/14
摘要:
Ion implantation systems and scanning systems are provided, in which a focus adjustment component is provided to adjust a focal property of an ion beam to diminish zero field effects of the scanner upon the ion beam. The focal property may be adjusted in order to improve the consistency of the beam profile scanned across the workpiece, or to improve the consistency of the ion implantation across the workpiece. Methods are disclosed for providing a scanned ion beam to a workpiece, comprising scanning the ion beam to produce a scanned ion beam, adjusting a focal property of an ion beam in relation to zero field effects of the scanner upon the ion beam, and directing the ion beam toward the workpiece.
公开/授权文献
- US20100155623A1 ION IMPLANTATION WITH DIMINISHED SCANNING FIELD EFFECTS 公开/授权日:2010-06-24
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