发明授权
- 专利标题: Method of creating asymmetric field-effect-transistors
- 专利标题(中): 制造不对称场效应晶体管的方法
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申请号: US12493549申请日: 2009-06-29
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公开(公告)号: US08017483B2公开(公告)日: 2011-09-13
- 发明人: Gregory G. Freeman , Shreesh Narasimha , Ning Su , Hasan M. Nayfeh , Nivo Rovedo , Werner A. Rausch , Jian Yu
- 申请人: Gregory G. Freeman , Shreesh Narasimha , Ning Su , Hasan M. Nayfeh , Nivo Rovedo , Werner A. Rausch , Jian Yu
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Yuanmin Cai
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
The present invention provides a method of forming asymmetric field-effect-transistors. The method includes forming at least a first and a second gate-mask stack on top of a semiconductor substrate, wherein the first and second gate-mask stacks include at least, respectively, a first and a second gate conductor of a first and a second transistor and have, respectively, a top surface, a first side, and a second side with the second side being opposite to the first side; performing a first halo implantation from the first side of the first and second gate-mask stacks at a first angle while applying the first gate-mask stack in preventing the first halo implantation from reaching a first source/drain region of the second transistor, wherein the first angle is equal to or larger than a predetermined value; and performing a second halo implantation from the second side of the first and second gate-mask stacks at a second angle, thereby creating halo implant in a second source/drain region of the second transistor, wherein the first and second angles are measured against a normal to the substrate.
公开/授权文献
- US20100330763A1 METHOD OF CREATING ASYMMETRIC FIELD-EFFECT-TRANSISTORS 公开/授权日:2010-12-30
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