发明授权
US08017486B2 Method of fabricating low on-resistance lateral double-diffused MOS device
有权
制造低导通电阻横向双扩散MOS器件的方法
- 专利标题: Method of fabricating low on-resistance lateral double-diffused MOS device
- 专利标题(中): 制造低导通电阻横向双扩散MOS器件的方法
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申请号: US11767205申请日: 2007-06-22
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公开(公告)号: US08017486B2公开(公告)日: 2011-09-13
- 发明人: Hsueh-I Huang , Chien-Wen Chu , Cheng-Chi Lin , Shih-Chin Lien , Chin-Pen Yeh , Shyi-Yuan Wu
- 申请人: Hsueh-I Huang , Chien-Wen Chu , Cheng-Chi Lin , Shih-Chin Lien , Chin-Pen Yeh , Shyi-Yuan Wu
- 申请人地址: TW Hsinchu
- 专利权人: MACRONIX International Co., Ltd.
- 当前专利权人: MACRONIX International Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: J.C. Patents
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A lateral-double diffused MOS device is provided. The device includes: a first well having a first conductive type and a second well having a second conductive type disposed in a substrate and adjacent to each other; a drain and a source regions having the first conductive type disposed in the first and the second wells, respectively; a field oxide layer (FOX) disposed on the first well between the source and the drain regions; a gate conductive layer disposed over the second well between the source and the drain regions extending to the FOX; a gate dielectric layer between the substrate and the gate conductive layer; a doped region having the first conductive type in the first well below a portion of the gate conductive layer and the FOX connecting to the drain region. A channel region is defined in the second well between the doped region and the source region.
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