发明授权
- 专利标题： Micro-electromechanical device and module and method of manufacturing same
- 专利标题（中）： 微机电装置及其制造方法
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申请号： US10561854申请日： 2004-06-23
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公开(公告)号： US08018307B2公开(公告)日： 2011-09-13
- 发明人: Jozef Thomas Martinus Van Beek , Peter Gerard Steeneken
- 申请人： Jozef Thomas Martinus Van Beek , Peter Gerard Steeneken
- 申请人地址： NL Eindhoven
- 专利权人： NXP B.V.
- 当前专利权人： NXP B.V.
- 当前专利权人地址： NL Eindhoven
- 优先权： EP03101911 20030626; EP03104042 20031031
- 国际申请： PCT/IB2004/050974 WO 20040623
- 国际公布： WO2004/114345 WO 20041229
- 主分类号： H01H51/22
- IPC分类号： H01H51/22
摘要：
The MEMS element of the invention has a first, a second and an intermediate third electrode. It is given an increased dynamic range in that the switchable capacitor constituted by the second and the third electrode is provided in the signal path between input and output, and that the switchable capacitor constituted by the first and third electrode is provided between the signal path and ground. The MEMS element of the invention is very suitable for integration in a network of passive components.
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