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公开(公告)号：US08717111B2
公开(公告)日：2014-05-06
申请号：US13122754
申请日：2009-10-08
摘要： An oscillator device comprises a resonator mass which is connected by a spring arrangement to a substrate and a feedback element for controlling oscillation of the resonator mass, which comprises a piezoresistive element connected between the resonator mass and the substrate. The invention provides an oscillator device in which the two parts (resonator and circuit to close the oscillation loop) are combined inside one single oscillator device, which can be a MEMS device.
摘要翻译： 振荡器装置包括通过弹簧装置连接到基板的谐振器质量块和用于控制谐振器质量块的振荡的反馈元件，该谐振器组件包括连接在谐振器体和基片之间的压阻元件。 本发明提供了一种振荡器装置，其中两个部分（谐振器和闭合振荡环路的电路）组合在一个可以是MEMS器件的单个振荡器装置内。
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公开(公告)号：US07898148B2
公开(公告)日：2011-03-01
申请号：US12159769
申请日：2006-09-08
IPC分类号： H01L41/09
CPC分类号： H03B5/32
摘要： An oscillator circuit is described comprising a piezoresistive resonator and a phase changing devices. Oscillator circuits with piezoresistive resonators do have the advantage that they can perform self-sustaining oscillation without additional active devices as e.g. transistors since they can be used as amplifiers. Phase changing devices as capacitors, coils and further piezoresistive resonator are used in order to compensate the π/2 phase shift of the piezoresistive resonator.
摘要翻译： 描述了包括压阻谐振器和相变装置的振荡器电路。 具有压阻谐振器的振荡器电路确实具有这样的优点：它们可以执行自维持振荡，而不需要额外的有源器件，例如， 晶体管，因为它们可以用作放大器。 使用相变装置作为电容器，线圈和其它压阻谐振器，以便补偿压阻谐振器的＆pgr / / 2相移。
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公开(公告)号：US07554425B2
公开(公告)日：2009-06-30
申请号：US10570435
申请日：2004-08-23
CPC分类号： H03H9/2405 , H03H9/02448 , H03H9/2463 , H03H2009/02496 , H03L1/04
摘要： The electromechanical transducer (1) has a resonator element (20) and an actuator (30) for inducing an elastic deformation of the resonator element (20) dependent on the electrical input signal. For temperature stabilization, the electromechanical transducer (1) has a sensing element (40) for providing an electrical sensing signal has a function of a temperature of the resonator element (20), and a heating element (50) for heating the resonator element to reduce the temperature dependent frequency deviation to keep the resonance frequency equal to the nominal frequency at operating temperature. The heating element (50) is controlled by an electrical heating signal based on the electrical sensing signal. The resonator element may have the hating element or the sensing element; it may be part of a wheatstone bridge; it may consist of two longitudinally extendable parts (201, 202) extending in opposite directions, being attached in a support area (204) in a deformation free part (203).
摘要翻译： 机电换能器（1）具有谐振元件（20）和致动器（30），用于根据电输入信号引起谐振元件（20）的弹性变形。 为了温度稳定，机电换能器（1）具有用于提供具有谐振元件（20）的温度的功能的电感测信号的感测元件（40）和用于将谐振元件加热到 降低温度相关的频率偏差，以保持谐振频率等于工作温度下的额定频率。 加热元件（50）由基于电感测信号的电加热信号控制。 谐振器元件可以具有憎恨元件或感测元件; 它可能是惠斯通电桥的一部分; 它可以包括沿相反方向延伸的两个纵向延伸的部分（201,202），它们连接在无变形部分（203）中的支撑区域（204）中。
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公开(公告)号：US20090026882A1
公开(公告)日：2009-01-29
申请号：US12159769
申请日：2006-09-08
IPC分类号： H01L41/04
CPC分类号： H03B5/32
摘要： An oscillator circuit is described comprising a piezoresistive resonator and a phase changing devices. Oscillator circuits with piezoresistive resonators do have the advantage that they can perform self-sustaining oscillation without additional active devices as e.g. transistors since they can be used as amplifiers. Phase changing devices as capacitors, coils and further piezoresistive resonator are used in order to compensate the π/2 phase shift of the piezoresistive resonator.
摘要翻译： 描述了包括压阻谐振器和相变装置的振荡器电路。 具有压阻谐振器的振荡器电路确实具有这样的优点：它们可以执行自维持振荡，而不需要额外的有源器件，例如， 晶体管，因为它们可以用作放大器。 使用相变装置作为电容器，线圈和其它压阻谐振器，以便补偿压阻谐振器的π/ 2相移。
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公开(公告)号：US08803623B2
公开(公告)日：2014-08-12
申请号：US13446398
申请日：2012-04-13
IPC分类号： H03B5/32 , H01L41/047 , H03H9/13 , H03H9/52
CPC分类号： H03H9/02448 , H03H9/02259 , H03H9/2426 , H03H2009/02496
摘要： A MEMS resonator has a component which provides a capacitance associated with the transduction gap which has a temperature-dependent dielectric characteristic, which varies in the same direction (i.e. the slope has the same sign) as the Young's modulus of the material of the resonator versus temperature. This means that the resonant frequency is less dependent on temperature.
摘要翻译： MEMS谐振器具有提供与换能间隙相关联的电容的元件，该电容具有温度相关的介电特性，其在与谐振器材料的杨氏模量相同的方向（即斜率具有相同的符号）上变化， 温度。 这意味着谐振频率较少依赖于温度。
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公开(公告)号：US20110193449A1
公开(公告)日：2011-08-11
申请号：US13122754
申请日：2009-10-08
IPC分类号： H01L41/09
摘要： An oscillator device comprises a resonator mass which is connected by a spring arrangement to a substrate and a feedback element for controlling oscillation of the resonator mass, which comprises a piezoresistive element connected between the resonator mass and the substrate. The invention provides an oscillator device in which the two parts (resonator and circuit to close the oscillation loop) are combined inside one single oscillator device, which can be a MEMS device.
摘要翻译： 振荡器装置包括通过弹簧装置连接到基板的谐振器质量块和用于控制谐振器质量块的振荡的反馈元件，该谐振器组件包括连接在谐振器体和基片之间的压阻元件。 本发明提供了一种振荡器装置，其中两个部分（谐振器和闭合振荡环路的电路）组合在一个可以是MEMS器件的单个振荡器装置内。
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公开(公告)号：US20120091546A1
公开(公告)日：2012-04-19
申请号：US13265535
申请日：2010-04-20
申请人： Geert Langereis , Twan Van Lippen , Freddy Roozeboom , Hilco Suy , Klaus Reimann , Jozef Thomas Martinus Van Beek , Casper Van Der Avoort , Johannes Van Wingerden , Kim Phan Le , Martijn Goosens , Peter Gerard Steeneken
发明人： Geert Langereis , Twan Van Lippen , Freddy Roozeboom , Hilco Suy , Klaus Reimann , Jozef Thomas Martinus Van Beek , Casper Van Der Avoort , Johannes Van Wingerden , Kim Phan Le , Martijn Goosens , Peter Gerard Steeneken
CPC分类号： H04R19/005 , B81B3/0072 , B81B2201/0257 , B81B2203/0127 , H04R7/18 , H04R19/04 , H04R31/006
摘要： A microphone comprises a substrate (20), a microphone membrane (10) defining an acoustic input surface and a backplate (11) supported with respect to the membrane with a fixed spacing between the backplate (11) and the membrane (10). A microphone periphery area comprises parallel corrugations (24) in the membrane (10) and backplate (11). By using the same corrugated suspension for both the membrane and the backplate, the sensitivity to body noise is optimally suppressed.
摘要翻译： 麦克风包括基板（20），限定声输入表面的麦克风膜（10）和相对于膜支撑的背板（11），所述背板（11）在背板（11）和膜（10）之间具有固定的间隔。 麦克风外围区域包括膜（10）和背板（11）中的平行波纹（24）。 通过对膜和背板使用相同的波纹悬挂，对身体噪声的敏感性被最佳地抑制。
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公开(公告)号：US08018307B2
公开(公告)日：2011-09-13
申请号：US10561854
申请日：2004-06-23
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01G5/40 , H01H2059/0027 , H01H2059/0045
摘要： The MEMS element of the invention has a first, a second and an intermediate third electrode. It is given an increased dynamic range in that the switchable capacitor constituted by the second and the third electrode is provided in the signal path between input and output, and that the switchable capacitor constituted by the first and third electrode is provided between the signal path and ground. The MEMS element of the invention is very suitable for integration in a network of passive components.
摘要翻译： 本发明的MEMS元件具有第一，第二和第三中间第三电极。 给予增加的动态范围，其中由第二和第三电极构成的可切换电容器设置在输入和输出之间的信号路径中，并且由第一和第三电极构成的可切换电容器设置在信号路径和 地面。 本发明的MEMS元件非常适合于集成在无源元件网络中。
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公开(公告)号：US08822254B2
公开(公告)日：2014-09-02
申请号：US13312503
申请日：2011-12-06
申请人： Jozef Thomas Martinus Van Beek , Klaus Reimann , Remco Henricus Wilhelmus Pijnenburg , Twan Van Lippen
发明人： Jozef Thomas Martinus Van Beek , Klaus Reimann , Remco Henricus Wilhelmus Pijnenburg , Twan Van Lippen
CPC分类号： B81B3/001 , B81B2201/0257 , B81B2201/0264
摘要： A MEMS manufacturing method and device in which a spacer layer is provided over a side wall of at least one opening in a structural layer which will define the movable MEMS element. The opening extends below the structural layer. The spacer layer forms a side wall portion over the side wall of the at least one opening and also extends below the level of the structural layer to form a contact area.
摘要翻译： 一种MEMS制造方法和装置，其中间隔层设置在将限定可移动MEMS元件的结构层中的至少一个开口的侧壁上。 开口延伸到结构层的下方。 间隔层在至少一个开口的侧壁上形成侧壁部分，并且还在结构层的水平面下方延伸以形成接触区域。
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公开(公告)号：US07750745B2
公开(公告)日：2010-07-06
申请号：US12088722
申请日：2006-09-21
IPC分类号： H03B5/30
CPC分类号： H03B5/30
摘要： An oscillator circuit has a first and a second piezoresistive resonator (1,2), each having a resonant frequency, each piezoresistive resonator having an input for driving the resonator, and each piezoresistive resonator having its input coupled directly to an output of the other of the resonators, to provide feedback according to a resistance of the respective resonator without amplification and without a phase shifter. This enables feedback without the need for another component to provide the phase shift. This means a simpler circuit can be used, which can facilitate greater integration and hence lower costs. By using piezoresistive resonators the need for an external crystal can be avoided, enabling greater integration and lower costs.
摘要翻译： 振荡器电路具有第一和第二压阻谐振器（1,2），每个具有谐振频率，每个压阻谐振器具有用于驱动谐振器的输入端，并且每个压阻谐振器的输入直接耦合到另一个的输出端 谐振器，以根据各个谐振器的电阻而无需放大而不使用移相器来提供反馈。 这使得反馈不需要另一个组件来提供相移。 这意味着可以使用更简单的电路，这可以促进更大的集成度，从而降低成本。 通过使用压阻谐振器，可以避免对外部晶体的需求，从而实现更高的集成度和更低的成本。
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