Invention Grant
- Patent Title: Underbump metallurgy for enhanced electromigration resistance
- Patent Title (中): 底部冶金用于增强电迁移率
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Application No.: US12054713Application Date: 2008-03-25
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Publication No.: US08022543B2Publication Date: 2011-09-20
- Inventor: Mukta G. Farooq , Robert Hannon , Emily R. Kinser , Ian D. Melville
- Applicant: Mukta G. Farooq , Robert Hannon , Emily R. Kinser , Ian D. Melville
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Joseph P. Abate, Esq.
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
A first metallic diffusion barrier layer is formed on a last level metal plate exposed in an opening of a passivation layer. Optionally, a metallic adhesion promotion layer is formed on the first metallic diffusion barrier layer. An elemental metal conductive layer is formed on the metallic adhesion promotion layer, which provides a highly conductive structure that distributes current uniformly due to the higher electrical conductivity of the material than the layers above or below. A stack of the second metallic diffusion barrier layer and a wetting promotion layer is formed, on which a C4 ball is bonded. The elemental metal conductive layer distributes the current uniformly within the underbump metallurgy structure, which induces a more uniform current distribution in the C4 ball and enhanced electromigration resistance of the C4 ball.
Public/Granted literature
- US20090243098A1 UNDERBUMP METALLURGY FOR ENHANCED ELECTROMIGRATION RESISTANCE Public/Granted day:2009-10-01
Information query
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