发明授权
- 专利标题： Pressure sensor having a high full-scale value with package thereof
- 专利标题（中）： 压力传感器具有高满量程的封装
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申请号： US12049915申请日： 2008-03-17
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公开(公告)号： US08024977B2公开(公告)日： 2011-09-27
- 发明人: Bruno Murari , Giulio Ricotti , Luigi Della Torre , Andrea Lorenzo Vitali
- 申请人： Bruno Murari , Giulio Ricotti , Luigi Della Torre , Andrea Lorenzo Vitali
- 申请人地址： IT Agrate Brianza
- 专利权人： STMicroelectronics S.r.l.
- 当前专利权人： STMicroelectronics S.r.l.
- 当前专利权人地址： IT Agrate Brianza
- 代理机构： Seed IP Law Group PLLC
- 代理商 Lisa K. Jorgenson; E. Russell Tarleton
- 主分类号： G01L9/06
- IPC分类号： G01L9/06
摘要：
A pressure sensor including a pressure-sensor element having a monolithic body of semiconductor material, and a first main face and a second main face acting on which is a stress resulting from a pressure, the value of which is to be determined; and a package enclosing the pressure-sensor element. The package has an inner chamber containing liquid material, and the pressure-sensor element is arranged within the inner chamber in such a manner that the first and second main faces are both in contact with the liquid material. In particular, the liquid material is a silicone gel.