发明授权
- 专利标题: Method for controlling the volume of a molecular beam
- 专利标题(中): 用于控制分子束体积的方法
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申请号: US12658024申请日: 2010-02-01
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公开(公告)号: US08025734B2公开(公告)日: 2011-09-27
- 发明人: Osamu Kobayashi , Toshihiko Ishida
- 申请人: Osamu Kobayashi , Toshihiko Ishida
- 申请人地址: JP Sanyoonoda-shi
- 专利权人: Choshu Industry Co., Ltd.
- 当前专利权人: Choshu Industry Co., Ltd.
- 当前专利权人地址: JP Sanyoonoda-shi
- 代理机构: Flynn, Thiel, Boutell & Tanis, P.C.
- 优先权: JP2005-318172 20051101
- 主分类号: C23C16/00
- IPC分类号: C23C16/00
摘要:
A molecular beam source for use in thin-film accumulation, which enables the adjustment of the volume of a molecular beam, which is discharged per hour by using a needle valve, to be constant irrespective of a decrease in a thin-film element-forming material remaining within a crucible, contains heaters 32 and 42 for heating the thin-film element-forming materials “a” and “b” within crucibles 31 and 41, and valves 33 and 43 for adjusting the volumes to be discharged of molecules of the thin-film element forming materials “a” and “b”, which are generated within the crucibles 31 and 41. It further contains a controller for adjusting the opening of the valves 33 and 43 by servomotors 36 and 46 through feeding back information relating to the volumes of the molecular beams.
公开/授权文献
- US20100170434A1 Method for controlling the volume of a molecular beam 公开/授权日:2010-07-08
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