发明授权
- 专利标题: Epitaxial growth of in-plane nanowires and nanowire devices
- 专利标题(中): 平面内纳米线和纳米线器件的外延生长
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申请号: US12492265申请日: 2009-06-26
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公开(公告)号: US08030108B1公开(公告)日: 2011-10-04
- 发明人: Seung Chang Lee , Steven R. J. Brueck
- 申请人: Seung Chang Lee , Steven R. J. Brueck
- 申请人地址: US NM Albuquerque
- 专利权人: STC.UNM
- 当前专利权人: STC.UNM
- 当前专利权人地址: US NM Albuquerque
- 代理机构: MH2 Technology Law Group LLP
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Exemplary embodiments provide semiconductor nanowires and nanowire devices/applications and methods for their formation. In embodiments, in-plane nanowires can be epitaxially grown on a patterned substrate, which are more favorable than vertical ones for device processing and three-dimensional (3D) integrated circuits. In embodiments, the in-plane nanowire can be formed by selective epitaxy utilizing lateral overgrowth and faceting of an epilayer initially grown in a one-dimensional (1D) nanoscale opening. In embodiments, optical, electrical, and thermal connections can be established and controlled between the nanowire, the substrate, and additional electrical or optical components for better device and system performance.
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