发明授权
- 专利标题: Movable micro-device
- 专利标题(中): 移动微型装置
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申请号: US12071746申请日: 2008-02-26
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公开(公告)号: US08031459B2公开(公告)日: 2011-10-04
- 发明人: Xiaoyu Mi , Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
- 申请人: Xiaoyu Mi , Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
- 申请人地址: JP Kawasaki
- 专利权人: Fujitsu Limited
- 当前专利权人: Fujitsu Limited
- 当前专利权人地址: JP Kawasaki
- 代理机构: Fujitsu Patent Center
- 优先权: JP2007-045578 20070226
- 主分类号: H01G5/01
- IPC分类号: H01G5/01 ; H01G5/04 ; H01G7/00
摘要:
A micro-device includes a movable part, a frame and a connecting part. The movable part has a main portion, a first capacitor electrode and a first driver electrode. The capacitor electrode and the driver electrode have electrode teeth extending from the main portion. The frame includes second capacitor and driver electrodes, where the second capacitor electrode has electrode teeth extending toward the first capacitor electrode, and the second driver electrode has electrode teeth extending toward the first driver electrode. The connecting part connects the movable part to the frame. The first and second capacitor electrodes have their electrode teeth overlapped in their initial position. The movable part is rotatable for varying the extent of the overlapping between the first and second driver electrodes.
公开/授权文献
- US20080218933A1 Movable micro-device 公开/授权日:2008-09-11
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