公开(公告)号：US08665579B2

公开(公告)日：2014-03-04

申请号：US12366417

申请日：2009-02-05

申请人： Takeaki Shimanouchi ,  Masahiko Imai ,  Xiaoyu Mi ,  Satoshi Ueda

发明人： Takeaki Shimanouchi ,  Masahiko Imai ,  Xiaoyu Mi ,  Satoshi Ueda

IPC分类号： G01G5/00

CPC分类号： H01G5/16

摘要： There is proved a variable capacitor that includes a substrate, a signal line disposed on a surface of the substrate for feeding a signal, a ground electrode disposed on the surface, and a movable electrode opposed the signal line and the ground electrode, the movable electrode operable to move toward and away from the signal line and the ground electrode. The movable electrode can be displaced by an electrostatic attraction between the movable electrode and the signal line and between the movable electrode and the signal line. An amount of displacement of the movable electrode varies according to an amount of the voltage which generates the electrostatic attraction.

摘要翻译： 证明了可变电容器，其包括基板，设置在用于馈送信号的基板的表面上的信号线，设置在表面上的接地电极和与信号线和接地电极相对的可动电极，可动电极 可操作地朝着和远离信号线和接地电极移动。 可移动电极可以通过可动电极和信号线之间以及可移动电极和信号线之间的静电吸引而移位。 可移动电极的位移量根据产生静电吸引力的电压的量而变化。

公开(公告)号：US20080239611A1

公开(公告)日：2008-10-02

申请号：US12071945

申请日：2008-02-28

申请人： Yu Yonezawa ,  Takeaki Shimanouchi ,  Naoyuki Mishima ,  Satoshi Ueda ,  Xiaoyu Mi ,  Masahiko Imai

发明人： Yu Yonezawa ,  Takeaki Shimanouchi ,  Naoyuki Mishima ,  Satoshi Ueda ,  Xiaoyu Mi ,  Masahiko Imai

IPC分类号： H01H47/00

CPC分类号： H01G5/16 ,  B81B7/008 ,  B81C99/003 ,  H01H2059/0018

摘要： In a method for drive controlling a micro machine device including two electrodes opposing each other and a dielectric layer sandwiched therebetween, a control voltage in a rectangular waveform in which positive and negative polarities are alternately inverted is applied between the two electrodes. A current passing through the micro machine device due to the application of the control voltage are detected with respect to positive and negative sides, and parameters related to a capacitance of the micro machine device are acquired with respect to the positive and negative sides on the basis of the detected current. The control voltage is controlled so that the parameters acquired with respect to the positive and negative sides accord with each other. Thus, variation of the capacitance between the positive side and the negative side can be suppressed in switching drive of a variable capacitance device.

摘要翻译： 在用于驱动控制包括彼此相对的两个电极和夹在其间的电介质层的微机器装置的方法中，在两个电极之间施加正负极性交替反转的矩形波形中的控制电压。 针对正侧和负侧检测由于施加控制电压而穿过微机器件的电流，并且基于正负侧获取与微机器件的电容相关的参数 的检测电流。 控制电压被控制，使得相对于正侧和负侧获取的参数彼此一致。 因此，可变电容器件的开关驱动可以抑制正侧和负极之间的电容的变化。

公开(公告)号：US20090207549A1

公开(公告)日：2009-08-20

申请号：US12366417

申请日：2009-02-05

申请人： Takeaki Shimanouchi ,  Masahiko Imai ,  Xiaoyu Mi ,  Satoshi Ueda

发明人： Takeaki Shimanouchi ,  Masahiko Imai ,  Xiaoyu Mi ,  Satoshi Ueda

IPC分类号： H01G7/06

CPC分类号： H01G5/16

摘要： There is proved a variable capacitor that includes a substrate, a signal line disposed on a surface of the substrate for feeding a signal, a ground electrode disposed on the surface, and a movable electrode opposed the signal line and the ground electrode, the movable electrode operable to move toward and away from the signal line and the ground electrode. The movable electrode can be displaced by an electrostatic attraction between the movable electrode and the signal line and between the movable electrode and the signal line. An amount of displacement of the movable electrode varies according to an amount of the voltage which generates the electrostatic attraction.

摘要翻译： 证明了可变电容器，其包括基板，设置在用于馈送信号的基板的表面上的信号线，设置在表面上的接地电极和与信号线和接地电极相对的可动电极，可动电极 可操作地朝着和远离信号线和接地电极移动。 可移动电极可以通过可动电极和信号线之间以及可移动电极和信号线之间的静电吸引而移位。 可移动电极的位移量根据产生静电吸引力的电压的量而变化。

公开(公告)号：US20080180876A1

公开(公告)日：2008-07-31

申请号：US12010367

申请日：2008-01-24

申请人： Takeaki Shimanouchi ,  Masahiko Imai ,  Yu Yonezawa ,  Xiaoyu Mi ,  Satoshi Ueda

发明人： Takeaki Shimanouchi ,  Masahiko Imai ,  Yu Yonezawa ,  Xiaoyu Mi ,  Satoshi Ueda

IPC分类号： H01G5/04

CPC分类号： H01G5/16 ,  H01G5/01 ,  H01G5/04 ,  H01G5/18

摘要： A variable capacitor is provided which is appropriate for suppressing fluctuation in driving voltage characteristic and for achieving a larger variation ratio of static capacitance. The variable capacitor includes a fixed electrode and a movable electrodetrode. The fixed electrode includes a first opposing face, while the movable electrode includes a second opposing face that faces the first opposing face. The movable electrode further includes a curved portion that protrudes toward the fixed electrode. The variable capacitor also includes a dielectric pattern provided on the first opposing face.

摘要翻译： 提供一种可变电容器，其适于抑制驱动电压特性的波动并且实现较大的静态电容的变化率。 可变电容器包括固定电极和可移动​​电极。 固定电极包括第一相对面，而可动电极包括面对第一相对面的第二相对面。 可动电极还包括向固定电极突出的弯曲部分。 可变电容器还包括设置在第一相对面上的电介质图案。

公开(公告)号：US07903386B2

公开(公告)日：2011-03-08

申请号：US12071945

申请日：2008-02-28

申请人： Yu Yonezawa ,  Takeaki Shimanouchi ,  Naoyuki Mishima ,  Satoshi Ueda ,  Xiaoyu Mi ,  Masahiko Imai

发明人： Yu Yonezawa ,  Takeaki Shimanouchi ,  Naoyuki Mishima ,  Satoshi Ueda ,  Xiaoyu Mi ,  Masahiko Imai

IPC分类号： H01G7/00 ,  H01G7/04 ,  H01G5/19

CPC分类号： H01G5/16 ,  B81B7/008 ,  B81C99/003 ,  H01H2059/0018

摘要： In a method for drive controlling a micro machine device including two electrodes opposing each other and a dielectric layer sandwiched therebetween, a control voltage in a rectangular waveform in which positive and negative polarities are alternately inverted is applied between the two electrodes. A current passing through the micro machine device due to the application of the control voltage are detected with respect to positive and negative sides, and parameters related to a capacitance of the micro machine device are acquired with respect to the positive and negative sides on the basis of the detected current. The control voltage is controlled so that the parameters acquired with respect to the positive and negative sides accord with each other. Thus, variation of the capacitance between the positive side and the negative side can be suppressed in switching drive of a variable capacitance device.

摘要翻译： 在用于驱动控制包括彼此相对的两个电极和夹在其间的电介质层的微机器装置的方法中，在两个电极之间施加正负极性交替反转的矩形波形中的控制电压。 针对正侧和负侧检测由于施加控制电压而穿过微机器件的电流，并且基于正负侧获取与微机器件的电容相关的参数 的检测电流。 控制电压被控制，使得相对于正侧和负侧获取的参数彼此一致。 因此，可变电容器件的开关驱动可以抑制正侧和负极之间的电容的变化。

公开(公告)号：US08031459B2

公开(公告)日：2011-10-04

申请号：US12071746

申请日：2008-02-26

申请人： Xiaoyu Mi ,  Takeaki Shimanouchi ,  Masahiko Imai ,  Satoshi Ueda

发明人： Xiaoyu Mi ,  Takeaki Shimanouchi ,  Masahiko Imai ,  Satoshi Ueda

IPC分类号： H01G5/01 ,  H01G5/04 ,  H01G7/00

CPC分类号： H01G5/16 ,  H01G5/011 ,  H01G5/06 ,  H03J3/20

摘要： A micro-device includes a movable part, a frame and a connecting part. The movable part has a main portion, a first capacitor electrode and a first driver electrode. The capacitor electrode and the driver electrode have electrode teeth extending from the main portion. The frame includes second capacitor and driver electrodes, where the second capacitor electrode has electrode teeth extending toward the first capacitor electrode, and the second driver electrode has electrode teeth extending toward the first driver electrode. The connecting part connects the movable part to the frame. The first and second capacitor electrodes have their electrode teeth overlapped in their initial position. The movable part is rotatable for varying the extent of the overlapping between the first and second driver electrodes.

摘要翻译： 微型装置包括可移动部件，框架和连接部件。 可动部具有主要部分，第一电容电极和第一驱动电极。 电容电极和驱动电极具有从主要部分延伸的电极齿。 该框架包括第二电容器和驱动电极，其中第二电容器电极具有朝着第一电容器电极延伸的电极齿，并且第二驱动电极具有朝向第一驱动电极延伸的电极齿。 连接部将可动部连接到框架。 第一和第二电容器电极的电极齿在其初始位置重叠。 可移动部分可旋转以改变第一和第二驱动器电极之间的重叠程度。

公开(公告)号：US07986507B2

公开(公告)日：2011-07-26

申请号：US12010367

申请日：2008-01-24

申请人： Takeaki Shimanouchi ,  Masahiko Imai ,  Yu Yonezawa ,  Xiaoyu Mi ,  Satoshi Ueda

发明人： Takeaki Shimanouchi ,  Masahiko Imai ,  Yu Yonezawa ,  Xiaoyu Mi ,  Satoshi Ueda

IPC分类号： H01G5/00

CPC分类号： H01G5/16 ,  H01G5/01 ,  H01G5/04 ,  H01G5/18

摘要： A variable capacitor is provided which is appropriate for suppressing fluctuation in driving voltage characteristic and for achieving a larger variation ratio of static capacitance. The variable capacitor includes a fixed electrode and a movable electrode. The fixed electrode includes a first opposing face, while the movable electrode includes a second opposing face that faces the first opposing face. The movable electrode further includes a curved portion that protrudes toward the fixed electrode. The variable capacitor also includes a dielectric pattern provided on the first opposing face.

摘要翻译： 提供一种可变电容器，其适于抑制驱动电压特性的波动并且实现较大的静态电容的变化率。 可变电容器包括固定电极和可动电极。 固定电极包括第一相对面，而可动电极包括面对第一相对面的第二相对面。 可动电极还包括向固定电极突出的弯曲部分。 可变电容器还包括设置在第一相对面上的电介质图案。

公开(公告)号：US20080218933A1

公开(公告)日：2008-09-11

申请号：US12071746

申请日：2008-02-26

申请人： Xiaoyu Mi ,  Takeaki Shimanouchi ,  Masahiko Imai ,  Satoshi Ueda

发明人： Xiaoyu Mi ,  Takeaki Shimanouchi ,  Masahiko Imai ,  Satoshi Ueda

IPC分类号： H01G5/011

CPC分类号： H01G5/16 ,  H01G5/011 ,  H01G5/06 ,  H03J3/20

摘要： A micro-device includes a movable part, a frame and a connecting part. The movable part has a main portion, a first capacitor electrode and a first driver electrode. The capacitor electrode and the driver electrode have electrode teeth extending from the main portion. The frame includes second capacitor and driver electrodes, where the second capacitor electrode has electrode teeth extending toward the first capacitor electrode, and the second driver electrode has electrode teeth extending toward the first driver electrode. The connecting part connects the movable part to the frame. The first and second capacitor electrodes have their electrode teeth overlapped in their initial position. The movable part is rotatable for varying the extent of the overlapping between the first and second driver electrodes.

摘要翻译： 微型装置包括可移动部件，框架和连接部件。 可动部具有主要部分，第一电容电极和第一驱动电极。 电容电极和驱动电极具有从主要部分延伸的电极齿。 该框架包括第二电容器和驱动电极，其中第二电容器电极具有朝着第一电容器电极延伸的电极齿，并且第二驱动电极具有朝向第一驱动电极延伸的电极齿。 连接部将可动部连接到框架。 第一和第二电容器电极的电极齿在其初始位置重叠。 可移动部分可旋转以改变第一和第二驱动器电极之间的重叠程度。

公开(公告)号：US20100246088A1

公开(公告)日：2010-09-30

申请号：US12662177

申请日：2010-04-05

申请人： Takeaki Shimanouchi ,  Masahiko Imai ,  Satoshi Ueda

发明人： Takeaki Shimanouchi ,  Masahiko Imai ,  Satoshi Ueda

IPC分类号： H01G7/06 ,  B05D5/12

CPC分类号： H01G5/18 ,  H01G5/38

摘要： A capacitor manufacturing method provides variable capacitors whose capacitances remain stable under the influence of temperature change. Such a variable capacitor includes a fixed electrode, a movable electrode film facing the fixed electrode, and an anchor portion that provides partial connection between the fixed electrode and the movable electrode film. For making this variable capacitor, a first electrode is formed to serve as the fixed electrode. Then, an anchor portion is formed on the fixed electrode, and a sacrifice film is formed to cover the fixed electrode but partially expose the anchor portion. A second electrode is formed on the sacrifice film to serve as the movable electrode film, bonded to the anchor portion. Finally, the sacrifice film is removed.

摘要翻译： 电容器制造方法提供了可变电容器，其电容在温度变化的影响下保持稳定。 这种可变电容器包括固定电极，与固定电极相对的可动电极膜，以及在固定电极和可动电极膜之间提供部分连接的锚固部分。 为了制造该可变电容器，形成第一电极用作固定电极。 然后，在固定电极上形成锚定部，并且形成牺牲膜以覆盖固定电极，但是部分地露出锚定部。 在牺牲膜上形成第二电极，作为可动电极膜，结合到锚定部。 最后，牺牲片被去除。

公开(公告)号：US20100142117A1

公开(公告)日：2010-06-10

申请号：US12604935

申请日：2009-10-23

申请人： Takeaki Shimanouchi ,  Masahiko Imai ,  Satoshi Ueda

发明人： Takeaki Shimanouchi ,  Masahiko Imai ,  Satoshi Ueda

IPC分类号： H01G5/011

CPC分类号： H01G5/18 ,  H01G5/011

摘要： A variable capacitive element which includes a substrate; a signal line provided on the substrate; a movable electrode provided so as to cross over the signal line and having a first end and a second end which are fixed to the substrate; and a fixed capacitive portion provided between at least one of the both ends of the movable electrode and the substrate.

摘要翻译： 一种包括衬底的可变电容元件; 设置在基板上的信号线; 可移动电极，设置成跨过信号线并且具有固定到基板的第一端和第二端; 以及设置在可动电极和基板的两端中的至少一个之间的固定电容部。