Invention Grant
- Patent Title: Aberration correction apparatus that corrects spherical aberration of charged particle apparatus
- Patent Title (中): 校正带电粒子装置的球面像差的畸变校正装置
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Application No.: US12379442Application Date: 2009-02-23
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Publication No.: US08035086B2Publication Date: 2011-10-11
- Inventor: Yoichi Hirayama , Takaho Yoshida
- Applicant: Yoichi Hirayama , Takaho Yoshida
- Applicant Address: JP Tokyo JP Okinawa
- Assignee: Hitachi, Ltd.,Okinawa Institute of Science and Technology Promotion Corporation
- Current Assignee: Hitachi, Ltd.,Okinawa Institute of Science and Technology Promotion Corporation
- Current Assignee Address: JP Tokyo JP Okinawa
- Agency: Stites & Harbison PLLC
- Agent Juan Carlos A. Marquez, Esq.
- Priority: JP2008-064717 20080313
- Main IPC: H01J3/24
- IPC: H01J3/24

Abstract:
To provide an aberration correction configuration that can realize both an aberration correction function for a long focus and an aberration correction function for a short focus. While having a conventional aberration correction apparatus configuration that has two rotationally symmetric lenses arranged between two multipole lenses, three rotationally symmetric lenses are disposed between an objective lens and a multipole lens instead of the conventional arrangement in which two rotationally symmetric lenses are disposed therebetween. When using the objective lens with a long focal length, aberrations are corrected using two rotationally symmetric lenses among three rotationally symmetric lenses disposed between the objective lens and the multipole lens. When using the objective lens with a short focal length, e.g. for high resolution observation, aberrations are corrected using two rotationally symmetric lenses of a different combination to those used for a long focus, among the three rotationally symmetric lenses disposed between the objective lens and the multipole lens. (See FIG. 3)
Public/Granted literature
- US20090230317A1 Aberration correction apparatus that corrects spherical aberration of charged particle apparatus Public/Granted day:2009-09-17
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