公开(公告)号：US20140252245A1

公开(公告)日：2014-09-11

申请号：US14271940

申请日：2014-05-07

Applicant: PARAM CORPORATION

Inventor： Hiroshi Yasuda

IPC: H01J37/143 ,  H01J37/30 ,  H01J37/317 ,  H01J3/24

CPC classification number: H01J3/24 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/20 ,  H01J37/143 ,  H01J37/3007 ,  H01J37/3174 ,  H01J37/3177 ,  H01J2237/002 ,  H01J2237/1405

Abstract: There provided a device for effectively drawing a fine pattern using a permanent magnet. The device has an outer cylinder 201 composed of a cylindrical ferromagnet with a Z axis as a central axis, a cylindrical permanent magnet 202 located inside the outer cylinder and polarized along the Z axis direction, a correction coil 204 located inside the cylindrical permanent magnet with a gap from the cylindrical permanent magnet, for adjusting a magnetic field strength generated by the cylindrical permanent magnet along the Z axis direction, and a coolant passage 203 located in the gap between the cylindrical permanent magnet and the correction coil, for allowing a coolant to flow therethrough and controlling temperature changes in the cylindrical permanent magnet.

Abstract translation: 提供了一种用于使用永磁体有效地绘制精细图案的装置。 该装置具有由Z轴作为中心轴的圆柱形铁磁体构成的外筒201，位于外筒内部并沿着Z轴方向极化的圆柱形永磁体202，位于筒状永久磁铁内部的校正线圈204， 用于调整由圆柱形永磁体沿Z轴方向产生的磁场强度的圆柱形永磁体的间隙和位于圆柱形永磁体和校正线圈之间的间隙中的冷却剂通道203，用于允许冷却剂 流过其中并控制圆筒形永磁体的温度变化。

公开(公告)号：US5861712A

公开(公告)日：1999-01-19

申请号：US675552

申请日：1996-07-03

Applicant: John Beetson ,  Andrew Knox

Inventor： John Beetson ,  Andrew Knox

IPC: B41J2/447 ,  G09G1/20 ,  H01J3/24 ,  H01J29/46 ,  H01J29/68

CPC classification number: H01J29/68 ,  B41J2/4476 ,  G09G1/20 ,  H01J29/46 ,  H01J3/24 ,  H01J2329/00

Abstract: An electron source having a cathode and a permanent magnet perforated by a plurality of channels extending between opposite poles thereof. The magnet generates, in each channel, a magnetic field which forms electrons received from the cathode into an electron beam for guidance towards a target. An electrode grid is disposed between the cathode and the magnet for controlling flow of electrons from the cathode into each channel. A magnetic field null region of each magnetic field is positioned at a location remote from the electrode grid. Because the null region is positioned remotely from the grid electrodes, flow of electrons can be improved without increasing electrode drive voltage.

Abstract translation: 电子源具有阴极和永久磁铁，该多个通道在其相对极之间延伸。 在每个通道中，磁体产生形成从阴极接收的电子到电子束的磁场，用于向目标引导。 电极栅格设置在阴极和磁体之间，用于控制电子从阴极到每个通道的流动。 每个磁场的磁场零区域位于远离电极栅格的位置。 因为零区域远离栅格电极，所以可以在不增加电极驱动电压的情况下改善电子流。

公开(公告)号：US5126575A

公开(公告)日：1992-06-30

申请号：US693784

申请日：1991-04-29

Applicant: Nicholas R. White

Inventor： Nicholas R. White

IPC: C23C14/48 ,  H01J3/24 ,  H01J37/05 ,  H01J37/317 ,  H01L21/265

CPC classification number: H01J37/3171 ,  H01J2237/083

Abstract: A single aperture ion source is used to produce a ribbon shaped ion beam through which a targer may be transported. At an aperture of the ion source the ion beam converges in a vertical direction and diverges in a horizontal direction. The ion beam is passed through the poles of an analyzing magnet. A waist of the ion beam in the vertical direction occurs at the analyzing magnet. The analyzing magnet causes the ion beam to converge in the horizontal direction. Immediately before the ion beam strikes the target, the ion beam is passed through a focussing magnet which renders the ion beam trajectories substantially parallel. Between the ion source and the target, the ion beam may be passed through one or more resolving slits, as necessary, to trim the ion beam and assure that a focused, uniform beam reached the target. At the target, the analyzing magnet projects an inverted image of the aperture of the ion source. Further, a cross section of the ion beam is in the shape of a ribbon, the length of the ribbon being wider than the target. Using a conveyer the target is passed through the ion beam resulting in a uniform implantation of ions.

Abstract translation: 使用单个孔径离子源来生产带状离子束，通过该离子束可以传送调节器。 在离子源的孔径处，离子束在垂直方向上会聚并沿水平方向发散。 离子束通过分析磁体的磁极。 离子束在垂直方向上的腰围发生在分析磁铁上。 分析磁铁使离子束在水平方向上会聚。 在离子束撞击目标物体之前，离子束通过聚焦磁体，使得离子束轨迹基本上平行。 在离子源和靶之间，离子束可以根据需要通过一个或多个分解狭缝，以修整离子束，并确保聚焦的均匀光束到达靶。 在目标处，分析磁体投射离子源的孔的反转图像。 此外，离子束的横截面为带状，色带的长度比目标宽。 使用输送机，目标物通过离子束，导致离子的均匀注入。

公开(公告)号：US09418815B2

公开(公告)日：2016-08-16

申请号：US14271940

申请日：2014-05-07

Applicant: PARAM CORPORATION

Inventor： Hiroshi Yasuda

IPC: H01J37/30 ,  H01J3/24 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/143 ,  H01J37/317 ,  H01J3/20

CPC classification number: H01J3/24 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/20 ,  H01J37/143 ,  H01J37/3007 ,  H01J37/3174 ,  H01J37/3177 ,  H01J2237/002 ,  H01J2237/1405

Abstract: There provided a device for effectively drawing a fine pattern using a permanent magnet. The device has an outer cylinder 201 composed of a cylindrical ferromagnet with a Z axis as a central axis, a cylindrical permanent magnet 202 located inside the outer cylinder and polarized along the Z axis direction, a correction coil 204 located inside the cylindrical permanent magnet with a gap from the cylindrical permanent magnet, for adjusting a magnetic field strength generated by the cylindrical permanent magnet along the Z axis direction, and a coolant passage 203 located in the gap between the cylindrical permanent magnet and the correction coil, for allowing a coolant to flow therethrough and controlling temperature changes in the cylindrical permanent magnet.

Abstract translation: 提供了一种用于使用永磁体有效地绘制精细图案的装置。 该装置具有由Z轴作为中心轴的圆柱形铁磁体构成的外筒201，位于外筒内部并沿着Z轴方向极化的圆柱形永磁体202，位于筒状永久磁铁内部的校正线圈204， 用于调整由圆柱形永磁体沿Z轴方向产生的磁场强度的圆柱形永磁体的间隙和位于圆柱形永磁体和校正线圈之间的间隙中的冷却剂通道203，用于允许冷却剂 流过其中并控制圆筒形永磁体的温度变化。

公开(公告)号：US08035086B2

公开(公告)日：2011-10-11

申请号：US12379442

申请日：2009-02-23

Applicant: Yoichi Hirayama ,  Takaho Yoshida

Inventor： Yoichi Hirayama ,  Takaho Yoshida

IPC: H01J3/24

CPC classification number: H01J3/12 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/1534 ,  H01J2237/28

Abstract: To provide an aberration correction configuration that can realize both an aberration correction function for a long focus and an aberration correction function for a short focus. While having a conventional aberration correction apparatus configuration that has two rotationally symmetric lenses arranged between two multipole lenses, three rotationally symmetric lenses are disposed between an objective lens and a multipole lens instead of the conventional arrangement in which two rotationally symmetric lenses are disposed therebetween. When using the objective lens with a long focal length, aberrations are corrected using two rotationally symmetric lenses among three rotationally symmetric lenses disposed between the objective lens and the multipole lens. When using the objective lens with a short focal length, e.g. for high resolution observation, aberrations are corrected using two rotationally symmetric lenses of a different combination to those used for a long focus, among the three rotationally symmetric lenses disposed between the objective lens and the multipole lens. (See FIG. 3)

Abstract translation: 提供能够实现长焦点的像差校正功能和短焦点的像差校正功能的像差校正配置。 在具有布置在两个多极透镜之间的两个旋转对称透镜的常规像差校正装置配置的同时，三个旋转对称透镜设置在物镜和多极透镜之间，而不是其中设置两个旋转对称透镜的常规布置。 当使用具有长焦距的物镜时，使用设置在物镜和多极镜头之间的三个旋转对称透镜之中的两个旋转对称透镜校正像差。 当使用具有短焦距的物镜时，例如， 对于高分辨率观察，在物镜和多极透镜之间设置的三个旋转对称透镜中，使用与用于长焦距的不同组合的两个旋转对称透镜来校正像差。 （参照图3）

公开(公告)号：US5753998A

公开(公告)日：1998-05-19

申请号：US675619

申请日：1996-07-03

Applicant: John Beeteson ,  Andrew Knox

Inventor： John Beeteson ,  Andrew Knox

IPC: G09G1/20 ,  H01J3/24 ,  H01J29/46 ,  H01J29/68 ,  H01J29/70

CPC classification number: H01J29/68 ,  G09G1/20 ,  H01J29/46 ,  H01J3/24 ,  H01J2329/00

Abstract: A display device having a cathode for emitting electrons and a permanent magnet. A two dimensional array of channels extends between opposite poles of the magnet. The magnet generates, in each channel, a magnetic field for forming electrons from the cathode into an electron beam. An electrode grid is disposed between the cathode and the magnet for controlling flow of electrons from the cathode into each channel. A screen has a phosphor coating having a plurality of groups of adjacent pixels facing the side of the magnet remote from the cathode. Each group corresponds to a different channel. A deflector sequentially addresses the electron beam from each channel to each pixel of the corresponding group.

Abstract translation: 具有用于发射电子的阴极和永磁体的显示装置。 通道的二维阵列在磁体的相对极之间延伸。 在每个通道中，磁体产生用于从阴极形成电子到电子束的磁场。 电极栅格设置在阴极和磁体之间，用于控制电子从阴极到每个通道的流动。 屏幕具有磷光体涂层，其具有面向离开阴极的磁体侧的多组相邻像素。 每组对应一个不同的通道。 偏转器顺序地将来自每个通道的电子束寻址到对应组的每个像素。

公开(公告)号：US5747923A

公开(公告)日：1998-05-05

申请号：US675009

申请日：1996-07-03

Applicant: John Beeteson ,  Andrew Knox

Inventor： John Beeteson ,  Andrew Knox

IPC: G09G1/20 ,  H01J3/24 ,  H01J29/46 ,  H01J29/68 ,  H01J29/70

CPC classification number: H01J29/68 ,  G09G1/20 ,  H01J29/46 ,  H01J3/24 ,  H01J2329/00

Abstract: A display device having a cathode for emitting electrons and a permanent magnet. A two dimensional array of channels extends between opposite poles of the magnet. The magnet generates, in each channel, a magnetic field for forming electrons from the cathode into an electron beam. A screen receives an electron beam from each channel. The screen has a phosphor coating facing the side of the magnet remote from the cathode. The phosphor coating having a plurality of pixels each corresponding to a different channel and each having a plurality of different color sub-pixels. An electrode grid is disposed between the cathode and the magnet for controlling flow of electrons from the cathode into each channel. A plurality of anodes each disposed on the surface of the magnet remote from the cathode, each corresponding to a different channel, and each having a first and second anode respectively extending along opposite sides of the corresponding channel for accelerating electrons through the corresponding channel and for sequentially addressing electrons emerging from the corresponding channel to different sub-pixels of the corresponding pixel. The first and second anodes associated with each channel are skewed relative to the sub-pixels of the corresponding pixel.

Abstract translation: 具有用于发射电子的阴极和永磁体的显示装置。 通道的二维阵列在磁体的相对极之间延伸。 在每个通道中，磁体产生用于从阴极形成电子到电子束的磁场。 屏幕从每个通道接收电子束。 屏幕具有面向离开阴极的磁体侧的磷光体涂层。 荧光体涂层具有多个像素，每个像素对应于不同的通道并且每个具有多个不同的颜色子像素。 电极栅格设置在阴极和磁体之间，用于控制电子从阴极到每个通道的流动。 多个阳极，每个阳极各自设置在远离阴极的磁体表面上，每个阳极分别对应于不同的通道，并且每个具有分别沿着相应通道的相对侧延伸的第一和第二阳极，用于加速电子通过相应的通道，并且 将从相应通道发出的电子顺序寻址到对应像素的不同子像素。 与每个通道相关联的第一和第二阳极相对于相应像素的子像素偏斜。

公开(公告)号：US10998158B1

公开(公告)日：2021-05-04

申请号：US16444412

申请日：2019-06-18

Applicant: Triad National Security, LLC

Inventor： John Lewellen ,  Kimberley Nichols ,  Heather Andrews ,  Ryan Fleming

IPC: H01J3/24 ,  H01J3/12

Abstract: Variable-focus solenoidal lenses for charged particle beams with integrated emittance filtering are disclosed. The emittance may be controlled via selection of collimating irises. The focal length may be changed by altering the spacing between two permanent ring magnets.

公开(公告)号：US09287084B2

公开(公告)日：2016-03-15

申请号：US14607736

申请日：2015-01-28

Applicant: Hitachi High-Technologies Corporation

Inventor： Zhaohui Cheng ,  Hideo Kashima ,  Hiroaki Baba ,  Takeyoshi Ohashi ,  Tomonori Nakano ,  Kotoko Urano ,  Naomasa Suzuki

IPC: G21K1/093 ,  H01J3/24 ,  H01J37/153

CPC classification number: H01J37/153 ,  H01J2237/032 ,  H01J2237/1534

Abstract: Provided are an aberration corrector that reduces irregularity of a magnetic field of a multipole to obtain an image of high resolution and a charged particle beam apparatus using the same. The aberration corrector includes a plurality of magnetic field type poles, a ring that magnetically connects the plurality of poles with one another and an adjustment member disposed between the pole and the ring to adjust a spacing between the pole and the ring per pole.

Abstract translation: 提供了减少多极的磁场的不规则性以获得高分辨率的图像和使用其的带电粒子束装置的像差校正器。 像差校正器包括多个磁场型磁极，将多个磁极彼此磁连接的环和设置在磁极和环之间的调节构件，以调节磁极与每个磁极之间的间隔。

公开(公告)号：US5760548A

公开(公告)日：1998-06-02

申请号：US674825

申请日：1996-07-03

Applicant: John Beeteson ,  Andrew Knox

Inventor： John Beeteson ,  Andrew Knox

IPC: B41J2/395 ,  G09F9/30 ,  G09G1/20 ,  H01J3/24 ,  H01J29/46 ,  H01J29/68 ,  H01J31/12 ,  G09G1/04 ,  H01J29/70

CPC classification number: G09G1/20 ,  H01J29/46 ,  H01J29/68 ,  H01J3/24 ,  H01J2329/00

Abstract: An electron source comprises cathode means and a permanent magnet. A plurality of channels disposed in the magnet in a two dimensional array of rows and columns and extending between opposite poles of the magnet. The magnet generates, in each channel, a magnetic field which forms electrons received from the cathode means into an electron beam for guidance towards a target. Grid electrode means are disposed between the cathode means and the magnet for controlling flow of electrons from the cathode means into each channel. The grid electrode means comprises a plurality of parallel row conductors and a plurality of parallel column conductors arranged orthogonally to the row conductors. Each channel is located at a different intersection of a row conductor and a column conductor. Electric field isolation means reduces leakage of electric fields from each intersection.

Abstract translation: 电子源包括阴极装置和永磁体。 多个通道，其设置在磁体中的二维阵列行和列并在磁体的相对极之间延伸。 磁体在每个通道中产生一个磁场，该磁场形成从阴极装置接收的电子为电子束，用于向目标引导。 栅极电极装置设置在阴极装置和磁体之间，用于控制电子从阴极装置流入每个通道。 栅格电极装置包括多个平行的行导体和与行导体垂直排列的多个平行的列导体。 每个通道位于行导体和列导体的不同交叉处。 电场隔离装置减少了每个交叉点的电场泄漏。