发明授权
US08035159B2 Device structure and manufacturing method using HDP deposited source-body implant block
有权
使用HDP沉积源体植入块的装置结构和制造方法
- 专利标题: Device structure and manufacturing method using HDP deposited source-body implant block
- 专利标题(中): 使用HDP沉积源体植入块的装置结构和制造方法
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申请号: US11796985申请日: 2007-04-30
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公开(公告)号: US08035159B2公开(公告)日: 2011-10-11
- 发明人: Anup Bhalla , François Hébert , Sung-Shan Tai , Sik K Lui
- 申请人: Anup Bhalla , François Hébert , Sung-Shan Tai , Sik K Lui
- 申请人地址: BM
- 专利权人: Alpha & Omega Semiconductor, Ltd.
- 当前专利权人: Alpha & Omega Semiconductor, Ltd.
- 当前专利权人地址: BM
- 代理商 Bo-In Lin
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L21/336
摘要:
This invention discloses a semiconductor power device. The trenched semiconductor power device includes a trenched gate, opened from a top surface of a semiconductor substrate, surrounded by a source region encompassed in a body region near the top surface above a drain region disposed on a bottom surface of a substrate. The semiconductor power device further includes an implanting-ion block disposed above the top surface on a mesa area next to the body region having a thickness substantially larger than 0.3 micron for blocking body implanting ions and source ions from entering into the substrate under the mesa area whereby masks for manufacturing the semiconductor power device can be reduced.
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