发明授权
US08035179B2 Packaged microelectronic imagers and methods of packaging microelectronic imagers
有权
封装的微电子成像器和包装微电子成像器的方法
- 专利标题: Packaged microelectronic imagers and methods of packaging microelectronic imagers
- 专利标题(中): 封装的微电子成像器和包装微电子成像器的方法
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申请号: US12364342申请日: 2009-02-02
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公开(公告)号: US08035179B2公开(公告)日: 2011-10-11
- 发明人: Kyle K. Kirby , Salman Akram , William M. Hiatt
- 申请人: Kyle K. Kirby , Salman Akram , William M. Hiatt
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Dickstein Shapiro LLP
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Microelectronic imagers, methods for packaging microelectronic imagers, and methods for forming electrically conductive through-wafer interconnects in microelectronic imagers are disclosed herein. In one embodiment, a microelectronic imaging die can include a microelectronic substrate, an integrated circuit, and an image sensor electrically coupled to the integrated circuit. A bond-pad is carried by the substrate and electrically coupled to the integrated circuit. An electrically conductive through-wafer interconnect extends partially through the substrate and is in contact with the bond-pad. The interconnect can include a passage extending partially through the substrate to the bond-pad, a dielectric liner deposited into the passage and in contact with the substrate, a conductive layer deposited onto at least a portion of the dielectric liner, a wetting agent deposited onto at least a portion of the conductive layer, and a conductive fill material deposited into the passage and electrically coupled to the bond-pad.
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