发明授权
US08039395B2 Technique for forming embedded metal lines having increased resistance against stress-induced material transport
有权
用于形成具有增加的抗应力诱导材料输送阻力的嵌入式金属线的技术
- 专利标题: Technique for forming embedded metal lines having increased resistance against stress-induced material transport
- 专利标题(中): 用于形成具有增加的抗应力诱导材料输送阻力的嵌入式金属线的技术
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申请号: US11009575申请日: 2004-12-10
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公开(公告)号: US08039395B2公开(公告)日: 2011-10-18
- 发明人: Moritz-Andreas Meyer , Hans-Juergen Engelmann , Ehrenfried Zschech , Peter Huebler
- 申请人: Moritz-Andreas Meyer , Hans-Juergen Engelmann , Ehrenfried Zschech , Peter Huebler
- 申请人地址: KY Grand Cayman
- 专利权人: Globalfoundries Inc.
- 当前专利权人: Globalfoundries Inc.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Williams, Morgan & Amerson, P.C.
- 优先权: DE102004003863 20040126
- 主分类号: H01L21/4763
- IPC分类号: H01L21/4763
摘要:
An alloy forming dopant material is deposited prior to the formation of a copper line, for instance by incorporating the dopant material into the barrier layer, which is then driven into the vicinity of a weak interface by means of a heat treatment. As indicated by corresponding investigations, the dopant material is substantially transported to the weak interface through grain boundary regions rather than through the bulk copper material (copper grains), thereby enabling moderately high alloy concentrations in the vicinity of the interface while maintaining a relatively low overall concentration within the grains. The alloy at the interface reduces electromigration along the interface.
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