发明授权
- 专利标题: Semiconductor nanowires charge sensor
- 专利标题(中): 半导体纳米线充电传感器
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申请号: US12324219申请日: 2008-11-26
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公开(公告)号: US08039909B2公开(公告)日: 2011-10-18
- 发明人: Ali Afzali-Ardakani , Lidija Sekaric , George S. Tulevski
- 申请人: Ali Afzali-Ardakani , Lidija Sekaric , George S. Tulevski
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Louis J. Percello, Esq.
- 主分类号: H01L27/14
- IPC分类号: H01L27/14
摘要:
A semiconductor nanowire is coated with a chemical coating layer that comprises a functional material which modulates the quantity of free charge carriers within the semiconductor nanowire. The outer surface of the chemical coating layer includes a chemical group that facilitates bonding with molecules to be detected through electrostatic forces. The bonding between the chemical coating layer and the molecules alters the electrical charge distribution in the chemical coating layer, which alters the amount of the free charge carriers and the conductivity in the semiconductor nanowire. The coated semiconductor nanowire may be employed as a chemical sensor for the type of chemicals that bonds with the functional material in the chemical coating layer. Detection of such chemicals may indicate pH of a solution, a vapor pressure of a reactive material in gas phase, and/or a concentration of a molecule in a solution.
公开/授权文献
- US20100129925A1 SEMICONDUCTOR NANOWIRES CHARGE SENSOR 公开/授权日:2010-05-27
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