发明授权
- 专利标题: Inspection system and method with multi-image phase shift analysis
- 专利标题(中): 多图像相移分析检测系统及方法
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申请号: US12469893申请日: 2009-05-21
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公开(公告)号: US08045181B2公开(公告)日: 2011-10-25
- 发明人: Gil Abramovich , Kevin George Harding , Ralph Gerald Isaacs , Guiju Song , Joseph Benjamin Ross , Jianming Zheng
- 申请人: Gil Abramovich , Kevin George Harding , Ralph Gerald Isaacs , Guiju Song , Joseph Benjamin Ross , Jianming Zheng
- 申请人地址: US NY Niskayuna
- 专利权人: General Electric Company
- 当前专利权人: General Electric Company
- 当前专利权人地址: US NY Niskayuna
- 代理商 Penny A. Clarke
- 主分类号: G01B11/24
- IPC分类号: G01B11/24
摘要:
An inspection system is provided. The inspection system comprises a light source, a grating, a phase shifting unit, an imager, and a processor. The light source is configured to generate light. The grating is in a path of the generated light and is configured to produce a grating image after the light passes through the grating. The phase shifting unit is configured to form and reflect a plurality of phase shifted patterns of the grating image onto an object surface to form a plurality of projected phase shifting patterns. The imager is configured to obtain image data of the projected phase shifted patterns. The processor is configured to reconstruct the object surface from the image data. An inspection method and a phase shifting projector are also presented.
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