发明授权
US08048688B2 Method and apparatus for evaluation and improvement of mechanical and thermal properties of CNT/CNF arrays
有权
用于评估和改进CNT / CNF阵列的机械和热性能的方法和装置
- 专利标题: Method and apparatus for evaluation and improvement of mechanical and thermal properties of CNT/CNF arrays
- 专利标题(中): 用于评估和改进CNT / CNF阵列的机械和热性能的方法和装置
-
申请号: US11618441申请日: 2006-12-29
-
公开(公告)号: US08048688B2公开(公告)日: 2011-11-01
- 发明人: Ephraim Suhir , Yuan Xu , Yi Zhang
- 申请人: Ephraim Suhir , Yuan Xu , Yi Zhang
- 申请人地址: KR Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 主分类号: H01L21/66
- IPC分类号: H01L21/66
摘要:
A method and apparatus for the evaluation and improvement of the mechanical and thermal properties of carbon-nanotube (CNT) and carbon nanofiber (CNF) arrays grown on a substrate is disclosed. The Young's modulus of a CNT/CNF material is measured by applying an axial compressive force on the CNT/CNF array and measuring the applied forces and the induced displacements. Also disclosed are the evaluation of the nonlinear stress-strain relationship of the CNT/CNF material, increasing of the Young's modulus and decreasing the thermal resistance by application of a compressive load, the application of rapid thermal annealing to improve the quality of the CNT/CNF material and to reduce the interfacial thermal resistance, improvement of the bonding strength of the CNT/CNF array to a substrate, evaluation of the bonding strength of the CNT/CNF array to a substrate, evaluation of the shearing force at failure, and an analytical stress model that enables one to predict the interfacial shearing stress from the measured force.
公开/授权文献
信息查询
IPC分类: