发明授权
- 专利标题： Method and mesh reference structures for implementing Z-axis cross-talk reduction through copper sputtering onto mesh reference planes
- 专利标题（中）： 用于通过铜溅射实现Z轴串扰减少的网格参考平面的方法和网格参考结构
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申请号： US11250043申请日： 2005-10-13
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公开(公告)号： US08053352B2公开(公告)日： 2011-11-08
- 发明人: Roger Allen Booth, Jr. , Matthew Stephen Doyle
- 申请人： Roger Allen Booth, Jr. , Matthew Stephen Doyle
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理商 Joan Pennington
- 主分类号： H01L21/4763
- IPC分类号： H01L21/4763
摘要：
A method and mesh reference applications are provided for implementing Z-axis cross-talk reduction. A mesh reference plane including a grid of mesh traces is formed with the mesh traces having selected thickness and width dimensions effective for reference current-flow distribution. An electrically conductive coating is deposited to fill the mesh electrical holes in the mesh reference plane to reduce cross-talk, substantially without affecting mechanical flexibility.
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