Invention Grant
- Patent Title: Methods of forming resistive memory devices
- Patent Title (中): 形成电阻式存储器件的方法
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Application No.: US12784230Application Date: 2010-05-20
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Publication No.: US08058097B2Publication Date: 2011-11-15
- Inventor: Jang-Eun Lee , Dae-Kyom Kim , Jun-Ho Jeong , Se-Chung Oh , Kyung-Tae Nam , Hyun-Jun Sim
- Applicant: Jang-Eun Lee , Dae-Kyom Kim , Jun-Ho Jeong , Se-Chung Oh , Kyung-Tae Nam , Hyun-Jun Sim
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec
- Priority: KR2007-91660 20070910
- Main IPC: H01L21/36
- IPC: H01L21/36

Abstract:
Methods of forming a resistive memory device include forming an insulation layer on a semiconductor substrate including a conductive pattern, forming a contact hole in the insulation layer to expose the conductive pattern, forming a lower electrode in the contact hole, forming a variable resistive oxide layer in the contact hole on the lower electrode, forming a middle electrode in the contact hole on the variable resistive oxide layer, forming a buffer oxide layer on the middle electrode and the insulation layer, and forming an upper electrode on the buffer oxide layer. Related resistive memory devices are also disclosed.
Public/Granted literature
- US20100233849A1 Methods of Forming Resistive Memory Devices Public/Granted day:2010-09-16
Information query
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