Invention Grant
- Patent Title: Gap processing
- Patent Title (中): 差距处理
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Application No.: US12175200Application Date: 2008-07-17
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Publication No.: US08058138B2Publication Date: 2011-11-15
- Inventor: Arthur J. McGinnis , Sachin Joshi , Chan Lim
- Applicant: Arthur J. McGinnis , Sachin Joshi , Chan Lim
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks Cameron & Huebsch, PLLC
- Main IPC: H01L21/76
- IPC: H01L21/76

Abstract:
Among various methods, devices, and apparatuses, a number of methods are provided for forming a gap between circuitry. One such method includes depositing a first oxide precursor material on at least two conductive lines having at least one gap between the at least two conductive lines, and forming a breadloaf configuration with the first oxide precursor material on a top of each of the at least two conductive lines that leaves a space between a closest approach of at least two adjacent breadloaf configurations. The method also includes depositing a second oxide precursor material over the first oxide precursor material, where depositing the second oxide precursor material results in closing the space between the closest approach of the at least two adjacent breadloaf configurations.
Public/Granted literature
- US20100015813A1 GAP PROCESSING Public/Granted day:2010-01-21
Information query
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