发明授权
- 专利标题： System and method of aligning a sample
- 专利标题（中）： 校准样品的系统和方法
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申请号： US12378400申请日： 2009-02-13
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公开(公告)号： US08064055B2公开(公告)日： 2011-11-22
- 发明人: Martin H. Liphardt , Blaine D. Johs
- 申请人： Martin H. Liphardt , Blaine D. Johs
- 申请人地址： US NE Lincoln
- 专利权人： J.A. Woollam Co., Inc.
- 当前专利权人： J.A. Woollam Co., Inc.
- 当前专利权人地址： US NE Lincoln
- 代理商 James D. Welch
- 主分类号： G01J4/00
- IPC分类号： G01J4/00
摘要：
A system and method of use thereof that enables determining and setting sample alignment based on the location of, and geometric attributes of a monitored image formed by reflection of an electromagnetic beam from a sample and into an image monitor, which beam is directed to be incident onto the sample along a locus which is substantially normal to the surface of the sample.
公开/授权文献
- US20090207408A1 System and method of aligning a sample 公开/授权日：2009-08-20
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