发明授权
- 专利标题： Semiconductor device
- 专利标题（中）： 半导体器件
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申请号： US12267465申请日： 2008-11-07
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公开(公告)号： US08065637B2公开(公告)日： 2011-11-22
- 发明人: Toshiya Kotani
- 申请人： Toshiya Kotani
- 申请人地址： JP Tokyo
- 专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人地址： JP Tokyo
- 代理机构： Finnegan Henderson Farabow Garrett & Dunner LLP
- 优先权： JP2003-190341 20030702
- 主分类号： G06F17/50
- IPC分类号： G06F17/50
摘要：
A semiconductor device having a physical pattern based on a designed pattern is provided. The designed pattern includes a target pattern and a correction pattern. The target pattern includes a first portion of an edge with a first distance between the first portion and a pattern opposed thereto, a second portion of the edge with a second distance between the second portion and a pattern opposed thereto, which is different from the first distance, and a third portion of the edge having a first region of the edge with the first distance between the first region and the pattern opposed thereto.
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