发明授权
US08068268B2 MEMS devices having improved uniformity and methods for making them
失效
具有改进的均匀性的MEMS器件和制造它们的方法
- 专利标题: MEMS devices having improved uniformity and methods for making them
- 专利标题(中): 具有改进的均匀性的MEMS器件和制造它们的方法
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申请号: US11773357申请日: 2007-07-03
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公开(公告)号: US08068268B2公开(公告)日: 2011-11-29
- 发明人: David L Heald , Fan Zhong , Philip Don Floyd
- 申请人: David L Heald , Fan Zhong , Philip Don Floyd
- 申请人地址: US CA San Diego
- 专利权人: QUALCOMM MEMS Technologies, Inc.
- 当前专利权人: QUALCOMM MEMS Technologies, Inc.
- 当前专利权人地址: US CA San Diego
- 代理机构: Knobbe Martens Olson & Bear LLP
- 主分类号: G02B26/00
- IPC分类号: G02B26/00
摘要:
Disclosed is a microelectromechanical system (MEMS) device and method of manufacturing the same. In one aspect, MEMS such as an interferometric modulator include one or more elongated interior posts and support rails supporting a deformable reflective layer, where the elongated interior posts are entirely within an interferometric cavity and aligned parallel with the support rails. In another aspect, the interferometric modulator includes one or more elongated etch release holes formed in the deformable reflective layer and aligned parallel with channels formed in the deformable reflective layer defining parallel strips of the deformable reflective layer.