发明授权
- 专利标题: System and method for model based multi-patterning optimization
- 专利标题(中): 基于模型的多图案优化的系统和方法
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申请号: US12189692申请日: 2008-08-11
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公开(公告)号: US08069423B2公开(公告)日: 2011-11-29
- 发明人: Justin Ghan , Abdurrahman Sezginer
- 申请人: Justin Ghan , Abdurrahman Sezginer
- 申请人地址: US CA San Jose
- 专利权人: Cadence Design Systems, Inc.
- 当前专利权人: Cadence Design Systems, Inc.
- 当前专利权人地址: US CA San Jose
- 代理机构: Adeli & Tollen LLP
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
Some embodiments provide a method for optimally decomposing patterns within particular spatial regions of interest on a particular layer of a design layout for a multi-exposure photolithographic process. Specifically, some embodiments model the spatial region using a mathematical equation in terms of two or more intensities. Some embodiments then optimize the model across a set of feasible intensities. The optimization yields a set of intensities such that the union of the patterns created/printed from each exposure intensity most closely approximates the patterns within the particular regions. Based on the set of intensities, some embodiments then determine a decomposition solution for the patterns that satisfies design constraints of a multi-exposure photolithographic printing process. In this manner, some embodiments achieve an optimal photolithographic printing of the particular regions of interest without performing geometric rule based decomposition.
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