发明授权
- 专利标题： Membrane for a MEMS condenser microphone
- 专利标题（中）： 用于MEMS电容式麦克风的膜
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申请号： US11914741申请日： 2006-04-25
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公开(公告)号： US08072010B2公开(公告)日： 2011-12-06
- 发明人: Josef Lutz
- 申请人： Josef Lutz
- 申请人地址： SG Singapore
- 专利权人： Knowles Electronics Asia PTE, Ltd.
- 当前专利权人： Knowles Electronics Asia PTE, Ltd.
- 当前专利权人地址： SG Singapore
- 代理机构： Dykema Gossett, PLLC
- 代理商 Steven McMahon Zeller, Esq.
- 优先权： EP05104093 20050517
- 国际申请： PCT/IB2006/051290 WO 20060425
- 国际公布： WO2006/123263 WO 20061123
- 主分类号： H01L29/84
- IPC分类号： H01L29/84
摘要：
A membrane (2) for a microphone (1) is disclosed which comprises a first portion (A1), a second portion (A2), and elements (E1 . . . E4, E1′ . . . E4′), which connect said first (A1) and said second portion (A2). The second portion (A2) is arranged for a movement in relation to said first portion (A1) around an idle position, which movement includes at least a translatory component in a direction of movement (dm) normal to said membrane (2). The elements (E1 . . . E4, E1′ . . . E4′) are provided for definition of a spring constant for said movement around said idle position and are arranged substantially along the outer border of said second portion (A2).
公开/授权文献
- US20080212409A1 Membrane For a Mems Condenser Microphone 公开/授权日：2008-09-04
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